Ion Implantation and Rapid Thermal Annealing in Synergy for Shallow Junction Formation

1996 ◽  
Vol 158 (1) ◽  
pp. 117-136 ◽  
Author(s):  
W. Lerch
Keyword(s):  
Ion Implantation ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Shallow Junction ◽  
Junction Formation

Rapid thermal annealing of spin-coated phosphoric acid films for shallow junction formation

1997 ◽  
Vol 71 (3) ◽  
pp. 392-394 ◽  
Author(s):  
S. Sivoththaman ◽  
W. Laureys ◽  
J. Nijs ◽  
R. Mertens
Keyword(s):  
Phosphoric Acid ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Shallow Junction ◽  
Junction Formation

Properties of the TiSi2/p+nstructures formed by ion implantation through silicide and rapid thermal annealing

1992 ◽  
Vol 72 (1) ◽  
pp. 73-77 ◽  
Author(s):  
H. B. Erzgräber ◽  
P. Zaumseil ◽  
E. Bugiel ◽  
R. Sorge ◽  
K. Tittelbach‐Helmrich ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing
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