scholarly journals A novel method for the discharge of electrostatic mirror formations in the scanning electron microscope

Scanning ◽  
2006 ◽  
Vol 19 (7) ◽  
pp. 498-504 ◽  
Author(s):  
W. K. Wong ◽  
J. C. H. Phang ◽  
J. T. L. Thong
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Novel Method ◽  
Electrostatic Mirror ◽  
Scanning Electron

Spot Electron-Beam Lithography as a Novel Method of High Resolution Pattern Nanofabrication

2014 ◽  
Vol 215 ◽  
pp. 459-461
Author(s):  
Alexander S. Samardak ◽  
Margarita V. Anisimova ◽  
Alexey V. Ognev ◽  
Vadim Yu. Samardak ◽  
Liudmila A. Chebotkevich
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Electron Beam Lithography ◽  
The Novel ◽  
Practical Applications ◽  
Novel Method ◽  
20 Nm ◽  
Scanning Electron

We present a novel method of pattern nanofabrication with high resolution and small shape defects using the traditional electron-beam lithography (EBL) or only a scanning electron microscope (SEM). Our method of Spot EBL is extremely fast, highly scalable on big areas, capable of sub-20 nm resolution and fabrication of polymer patterns with complicated shapes. We show the nanostructure images fabricated by Spot EBL and propose practical applications of the novel method.

scholarly journals Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope

2011 ◽  
Vol 2011 ◽  
pp. 1-7 ◽  
Author(s):  
Joon Huang Chuah ◽  
David Holburn
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Supply Voltage ◽  
Optical Power ◽  
Cmos Technology ◽  
Photon Detector ◽  
Transimpedance Amplifiers ◽  
Electron Detection ◽  
Novel Method ◽  
Scanning Electron

This paper presents a novel method of detecting secondary electrons generated in the scanning electron microscope (SEM). The method suggests that the photomultiplier tube (PMT), traditionally used in the Everhart-Thornley (ET) detector, is to be replaced with a configurable multipixel solid-state photon detector offering the advantages of smaller dimension, lower supply voltage and power requirements, and potentially cheaper product cost. The design of the proposed detector has been implemented using a standard 0.35 μm CMOS technology with optical enhancement. This microchip comprises main circuit constituents of an array of photodiodes connecting to respective noise-optimised transimpedance amplifiers (TIAs), a selector-combiner (SC) circuit, and a postamplifier (PA). The design possesses the capability of detecting photons with low input optical power in the range of 1 nW with 100 μm × 100 μm sized photodiodes and achieves a total amplification of 180 dBΩ at the output.

Scanning Transmission Imaging of Elastomer Blends Using an Unmodified Conventional Scanning Electron Microscope

1995 ◽  
Vol 68 (2) ◽  
pp. 342-350 ◽  
Author(s):  
Paul E. F. Cudby ◽  
Barry A. Gilbey
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Transmission Electron Microscopy ◽  
Transmission Imaging ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Novel Method ◽  
Conventional Microscopy ◽  
Microscopy Techniques ◽  
Scanning Electron

Abstract A novel method for carrying out scanning transmission electron microscopy on a standard scanning electron microscope is described. This method involves the addition of a specially fabricated mount and is accomplished without carrying out any form of modification on the microscope. The method is compared to more conventional microscopy techniques and examples are given showing the advantages of this system.

A Novel Method to Inspect Deep Trench Capacitor Planar Profiles in DRAM

2006 ◽  
Author(s):  
J. L. Lue ◽  
A. Huang ◽  
T. Wang
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Cost Effective ◽  
Large Area ◽  
Deep Trench ◽  
Milling Method ◽  
Novel Method ◽  
Scanning Electron

Abstract This paper presents a novel method to inspect deep trench (DT) planar profiles at any particular depths using the mechanical polishing method instead of the Focused Ion Beam (FIB) milling method. The sample is polished at a small beveled angle and then inspected in the Scanning Electron Microscope (SEM). This method creates a large area for the inspection of DT profiles. It is accurate and fast in providing the result on process evaluation and failure analysis. Since the FIB is not needed, it is also simple and cost effective.

Novel Method for Controlled Wetting of Materials in the Environmental Scanning Electron Microscope

2013 ◽  
Vol 19 (1) ◽  
pp. 30-37 ◽  
Author(s):  
Anna Jansson ◽  
Alexandra Nafari ◽  
Anke Sanz-Velasco ◽  
Krister Svensson ◽  
Stefan Gustafsson ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Environmental Scanning Electron Microscopy ◽  
Water Reservoir ◽  
Cellulose Fibers ◽  
Environmental Scanning Electron Microscope ◽  
Environmental Scanning ◽  
Wetting Properties ◽  
Novel Method ◽  
Scanning Electron

AbstractEnvironmental scanning electron microscopy has been extensively used for studying the wetting properties of different materials. For some types of investigation, however, the traditional ways of conducting in situ dynamic wetting experiments do not offer sufficient control over the wetting process. Here, we present a novel method for controlled wetting of materials in the environmental scanning electron microscope (ESEM). It offers improved control of the point of interaction between the water and the specimen and renders it more accessible for imaging. It also enables the study of water transport through a material by direct imaging. The method is based on the use of a piezo-driven nanomanipulator to bring a specimen in contact with a water reservoir in the ESEM chamber. The water reservoir is established by local condensation on a Peltier-cooled surface. A fixture was designed to make the experimental setup compatible with the standard Peltier cooling stage of the microscope. The developed technique was successfully applied to individual cellulose fibers, and the absorption and transport of water by individual cellulose fibers were imaged.

Sign in / Sign up

Export Citation Format

Share Document