A novel method for acquiring large-scale automated scanning electron microscope data

2011 ◽  
Vol 244 (2) ◽  
pp. 181-186 ◽  
Author(s):  
A.R. SHIVELEY ◽  
P.A. SHADE ◽  
A.L. PILCHAK ◽  
J.S. TILEY ◽  
R. KERNS
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Large Scale ◽  
Novel Method ◽  
Automated Scanning ◽  
Scanning Electron Microscope Data ◽  
Electron Microscope Data ◽  
Scanning Electron

Spot Electron-Beam Lithography as a Novel Method of High Resolution Pattern Nanofabrication

2014 ◽  
Vol 215 ◽  
pp. 459-461
Author(s):  
Alexander S. Samardak ◽  
Margarita V. Anisimova ◽  
Alexey V. Ognev ◽  
Vadim Yu. Samardak ◽  
Liudmila A. Chebotkevich
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Electron Beam Lithography ◽  
The Novel ◽  
Practical Applications ◽  
Novel Method ◽  
20 Nm ◽  
Scanning Electron

We present a novel method of pattern nanofabrication with high resolution and small shape defects using the traditional electron-beam lithography (EBL) or only a scanning electron microscope (SEM). Our method of Spot EBL is extremely fast, highly scalable on big areas, capable of sub-20 nm resolution and fabrication of polymer patterns with complicated shapes. We show the nanostructure images fabricated by Spot EBL and propose practical applications of the novel method.

scholarly journals Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope

2011 ◽  
Vol 2011 ◽  
pp. 1-7 ◽  
Author(s):  
Joon Huang Chuah ◽  
David Holburn
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Supply Voltage ◽  
Optical Power ◽  
Cmos Technology ◽  
Photon Detector ◽  
Transimpedance Amplifiers ◽  
Electron Detection ◽  
Novel Method ◽  
Scanning Electron

This paper presents a novel method of detecting secondary electrons generated in the scanning electron microscope (SEM). The method suggests that the photomultiplier tube (PMT), traditionally used in the Everhart-Thornley (ET) detector, is to be replaced with a configurable multipixel solid-state photon detector offering the advantages of smaller dimension, lower supply voltage and power requirements, and potentially cheaper product cost. The design of the proposed detector has been implemented using a standard 0.35 μm CMOS technology with optical enhancement. This microchip comprises main circuit constituents of an array of photodiodes connecting to respective noise-optimised transimpedance amplifiers (TIAs), a selector-combiner (SC) circuit, and a postamplifier (PA). The design possesses the capability of detecting photons with low input optical power in the range of 1 nW with 100 μm × 100 μm sized photodiodes and achieves a total amplification of 180 dBΩ at the output.

Scanning Transmission Imaging of Elastomer Blends Using an Unmodified Conventional Scanning Electron Microscope

1995 ◽  
Vol 68 (2) ◽  
pp. 342-350 ◽  
Author(s):  
Paul E. F. Cudby ◽  
Barry A. Gilbey
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Transmission Electron Microscopy ◽  
Transmission Imaging ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Novel Method ◽  
Conventional Microscopy ◽  
Microscopy Techniques ◽  
Scanning Electron

Abstract A novel method for carrying out scanning transmission electron microscopy on a standard scanning electron microscope is described. This method involves the addition of a specially fabricated mount and is accomplished without carrying out any form of modification on the microscope. The method is compared to more conventional microscopy techniques and examples are given showing the advantages of this system.

Quantitative evaluation of materials by scanning electron microscopy

1988 ◽  
Vol 46 ◽  
pp. 674-675
Author(s):  
S. Pignolet-Brandom ◽  
K. J. Reid
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Quantitative Evaluation ◽  
Integrated System ◽  
Sample Chamber ◽  
Data Files ◽  
Automated Scanning ◽  
Scanning Electron

QEM*SEM, or quantitative evaluation of materials by scanning electron microscopy, is a fully automated scanning electron microscope system that was designed and engineered by CSIRO in Australia for applications to the minerals industry. It is an integrated system in which the computer and its associated hardware and software control SEM operations. Minerals can be identified in point, linear or area scans. Depending on the type of scan, information is extracted from the data files and summarized in tables and graphs covering mineral abudances, associations, sizes, free surface area and the degree of liberation. In addition, area scans can be replayed on a graphics monitor to produce QEM*SEM mineral species maps.The QEM*SEM system consists of an International Scientific Instruments SX-40 scanning electron microscope with a specially designed sample chamber that permits 100 mm movement of the stage. The EDS units were designed for rapid collection of x-ray spectra and consist of four lithium drifted silicon detectors each with a separate preamplifier.

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