“Multipoint Force Feedback” Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography

Small ◽  
2015 ◽  
Vol 11 (35) ◽  
pp. 4526-4531 ◽  
Author(s):  
Hanaul Noh ◽  
Goo-Eun Jung ◽  
Sukhyun Kim ◽  
Seong-Hun Yun ◽  
Ahjin Jo ◽  
...  
Small ◽  
2015 ◽  
Vol 11 (35) ◽  
pp. 4413-4413 ◽  
Author(s):  
Hanaul Noh ◽  
Goo-Eun Jung ◽  
Sukhyun Kim ◽  
Seong-Hun Yun ◽  
Ahjin Jo ◽  
...  

2009 ◽  
Vol 17 (2) ◽  
pp. 30-33
Author(s):  
Jason Haaheim ◽  
Omkar A. Nafday

Dip Pen Nanolithography (DPN) is a scanning probe lithography technique where an atomic force microscope tip is used to transfer molecules to a surface via a solvent meniscus. This technique allows surface patterning on scales of under 100 nanometres. DPN is the nanotechnology analog of the dip pen (also called the quill pen), where the tip of an atomic force microscope cantilever acts as a “pen,” which is coated with a chemical compound or mixture acting as an “ink,” and put in contact with a substrate, the “paper.”DPN enables direct deposition of nanoscale materials onto a substrate in a flexible manner. The vehicle for deposition can include pyramidal scanning probe microscope tips, hollow tips, and even tips on thermally actuated cantilevers. Recent advances have demonstrated massively parallel patterning using two-dimensional arrays of 55,000 tips, depicted below. Applications of this technology currently range through chemistry, materials science, and the life sciences, and include such work as ultra high density biological nanoarrays, additive photomask repair, and brand protection for pharmaceuticals.


2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Jaqueline Stauffenberg ◽  
Ingo Ortlepp ◽  
Ulrike Blumröder ◽  
Denis Dontsov ◽  
Christoph Schäffel ◽  
...  

Abstract This contribution deals with the analysis of the positioning accuracy of a new Nano Fabrication Machine. This machine uses a planar direct drive system and has a positioning range up to 100 mm in diameter. The positioning accuracy was investigated in different movement scenarios, including phases of acceleration and deceleration. Also, the target position error of certain movements at different positions of the machine slider is considered. Currently, the NFM-100 is equipped with a tip-based measuring system. This Atomic Force Microscope (AFM) uses self-actuating and self-sensing microcantilevers, which can be used also for Field-Emission-Scanning-Probe-Lithography (FESPL). This process is capable of fabricating structures in the range of nanometres. In combination with the NFM-100 and its positioning range, nanostructures can be analysed and written in a macroscopic range without any tool change. However, the focus in this article is on the measurement and positioning accuracy of the tip-based measuring system in combination with the NFM-100 and is verified by repeated measurements. Finally, a linescan, realised using both systems, is shown over a long range of motion of 30 mm.


2005 ◽  
Vol 87 (5) ◽  
pp. 054102 ◽  
Author(s):  
Xuefeng Wang ◽  
Loren Vincent ◽  
David Bullen ◽  
Jun Zou ◽  
Chang Liu

Nanomaterials ◽  
2018 ◽  
Vol 8 (7) ◽  
pp. 536 ◽  
Author(s):  
Ignacio Falcón Casas ◽  
Wolfgang Kautek

Optical methods in nanolithography have been traditionally limited by Abbe’s diffraction limit. One method able to overcome this barrier is apertureless scanning probe lithography assisted by laser. This technique has demonstrated surface nanostructuring below the diffraction limit. In this study, we demonstrate how a femtosecond Yb-doped fiber laser oscillator running at high repetition rate of 46 MHz and a pulse duration of 150 fs can serve as the laser source for near-field nanolithography. Subwavelength features were generated on the surface of gold films down to a linewidth of 10 nm. The near-field enhancement in this apertureless scanning probe lithography setup could be determined experimentally for the first time. Simulations were in good agreement with the experiments. This result supports near-field tip-enhancement as the major physical mechanisms responsible for the nanostructuring.


1998 ◽  
Vol 72 (13) ◽  
pp. 1581-1583 ◽  
Author(s):  
Masayoshi Ishibashi ◽  
Seiji Heike ◽  
Hiroshi Kajiyama ◽  
Yasuo Wada ◽  
Tomihiro Hashizume

Author(s):  
Mathias Holz ◽  
Elshad Guliyev ◽  
Ahmad Ahmad ◽  
Tzvetan Ivanov ◽  
Alexander Reum ◽  
...  

2018 ◽  
Vol 124 (14) ◽  
pp. 144502 ◽  
Author(s):  
Zahid Durrani ◽  
Mervyn Jones ◽  
Faris Abualnaja ◽  
Chen Wang ◽  
Marcus Kaestner ◽  
...  

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