A Level Set Approach to a Unified Model for Etching, Deposition, and Lithography II: Three-Dimensional Simulations
1995 ◽
Vol 122
(2)
◽
pp. 348-366
◽
Keyword(s):
2014 ◽
Vol 4
(5)
◽
pp. 562-567
◽
1995 ◽
Vol 120
(1)
◽
pp. 128-144
◽
2018 ◽
Vol 2018
◽
pp. 1-15
◽
1997 ◽
Vol 138
(1)
◽
pp. 193-223
◽
2002 ◽
Vol 3
(2)
◽
pp. 53-58
◽