A Level Set Approach to a Unified Model for Etching, Deposition, and Lithography II: Three-Dimensional Simulations

1995 ◽  
Vol 122 (2) ◽  
pp. 348-366 ◽  
Author(s):  
D. Adalsteinsson ◽  
J.A. Sethian
Author(s):  
Julien Bruchon ◽  
Daniel Pino Muñoz ◽  
François Valdivieso ◽  
Sylvain Drapier ◽  
Guillaume Pacquaut

Within the framework of the sintering process simulation, this paper proposes a numerical strategy for the direct simulation of the matter transport by surface diffusion. A level-set method is used to describe the topological changes which arise at the free boundary of the sintering particles. The surface velocity is found to be proportional to the surface Laplacian of the curvature, that is, proportional to the fourth-order derivative of the level-set function. Consequently, both curvature and velocity must be computed carefully and with accuracy. Finally, three-dimensional simulations are shown and investigated.


2018 ◽  
Vol 2018 ◽  
pp. 1-15 ◽  
Author(s):  
Ran Wei ◽  
Futing Bao ◽  
Yang Liu ◽  
Weihua Hui

With a purpose to evolve the surfaces of complex geometries in their normal direction at arbitrarily defined velocities, we have developed a robust level-set approach which runs on three-dimensional unstructured meshes. The approach is built on the basis of an innovative spatial discretization and corresponding gradient-estimating approach. The numerical consistency of the estimating method is mathematically proven. A correction technology is utilized to improve accuracy near sharp geometric features. Validation tests show that the proposed approach is able to accurately handle geometries containing sharp features, computation regions having irregular shapes, discontinuous speed fields, and topological changes. Results of the test problems fit well with the reference results produced by analytical or other numerical methods and converge to reference results as the meshes refine. Compared to level-set method implementations on Cartesian meshes, the proposed approach makes it easier to describe jump boundary conditions and to perform coupling simulations.


Author(s):  
Mamta Raju Jotkar ◽  
Daniel Rodriguez ◽  
Bruno Marins Soares

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