Laboratory Characterization for Indoor Scenario of the Micro Gas Sensor SGX SENSORTECH MICS6814

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

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Catalytic Micro Gas Sensor with Excellent Homogeneous Temperature Distribution and Low Power Consumption for Long-Term Stable Operation

Proceedings ◽

10.3390/proceedings2130927 ◽

2018 ◽

Vol 2 (13) ◽

pp. 927 ◽

Cited By ~ 1

Author(s):

Anmona Shabnam Pranti ◽

Daniel Loof ◽

Sebastian Kunz ◽

Marcus Bäumer ◽

Walter Lang

Keyword(s):

Temperature Distribution ◽

Low Power ◽

Gas Sensor ◽

Gas Flow ◽

Pt Nanoparticles ◽

Stable Operation ◽

Catalytic Layer ◽

Micro Gas Sensor ◽

Homogeneous Temperature

This paper presents a long-term stable thermoelectric micro gas sensor with ligand linked Pt nanoparticles as catalyst. The sensor design gives an excellent homogeneous temperature distribution over the catalytic layer, an important factor for long-term stability. The sensor consumes very low power, 18 mW at 100 °C heater temperature. Another thermoresistive sensor is also fabricated with same material for comparative analysis. The thermoelectric sensor gives better temperature homogeneity and consumes 23% less power than thermoresistive sensor for same average temperature on the membrane. The sensor shows linear characteristics with temperature change and has significantly high Seebeck coefficient of 6.5 mV/K. The output of the sensor remains completely constant under 15,000 ppm continuous H2 gas flow for 24 h. No degradation of sensor signal for 24 h indicates no deactivation of catalytic layer over the time. The sensor is tested with 3 different amount of catalyst at 2 different operating temperatures under 6000 ppm and 15,000 ppm continuous H2 gas flow for 4 h. Sensor output is completely stable for 3 different amount of catalyst.

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Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption

Journal of Sensor Science and Technology ◽

10.5369/jsst.2011.20.5.317 ◽

2011 ◽

Vol 20 (5) ◽

pp. 317-321 ◽

Cited By ~ 1

Author(s):

Woong-Jin Jang ◽

Kwang-Bum Park ◽

In-Ho Kim ◽

Soon-Sup Park ◽

Hyo-Derk Park ◽

...

Keyword(s):

Power Consumption ◽

Low Power ◽

Gas Sensor ◽

Low Power Consumption ◽

Micro Gas Sensor

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A novel micro gas sensor with high selectivity based on both mass and conductivity measurement

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838499 ◽

2002 ◽

Author(s):

Tao Xu ◽

Guoying Wu ◽

Guobing Zhang ◽

Wei Wang ◽

Ting Li

Keyword(s):

Gas Sensor ◽

High Selectivity ◽

Conductivity Measurement ◽

Micro Gas Sensor

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Double-Step Modulation of the Pulse-Driven Mode for a High-Performance SnO2 Micro Gas Sensor: Designing the Particle Surface via a Rapid Preheating Process

ACS Sensors ◽

10.1021/acssensors.0c01365 ◽

2020 ◽

Vol 5 (11) ◽

pp. 3449-3456 ◽

Cited By ~ 1

Author(s):

Koichi Suematsu ◽

Yuki Hiroyama ◽

Wataru Harano ◽

Wataru Mizukami ◽

Ken Watanabe ◽

...

Keyword(s):

Gas Sensor ◽

High Performance ◽

Particle Surface ◽

Double Step ◽

Micro Gas Sensor

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Development of Knudsen thermal force for mass analysis of CH4/He gas mixture

International Journal of Modern Physics C ◽

10.1142/s0129183119500025 ◽

2019 ◽

Vol 30 (01) ◽

pp. 1950002 ◽

Cited By ~ 6

Author(s):

Mostafa Barzegar Gerdroodbary ◽

D. D. Ganji ◽

Mohammad Taeibi-Rahni ◽

B. Pruiti ◽

Rasoul Moradi

Keyword(s):

Natural Gas ◽

Gas Sensor ◽

Direct Simulation Monte Carlo ◽

Low Pressure ◽

Rectangular Domain ◽

Gas Mixture ◽

Micro Gas Sensor ◽

High Order Equation ◽

Helium Gas ◽

Simulation Monte Carlo

Natural gas is known as the main source of energy and also contains significant and noble gases. Numerous researches have been performed to present novel methods for the detection and analysis of natural gas. In this study, Direct Simulation Monte Carlo (DSMC) method is used to evaluate the performance of a new micro gas sensor (MIKRA) for detection of helium in CH4/He gas mixture. In this sensor, the temperature difference of two arms inside a rectangular domain at low-pressure condition induces a Knudsen force which is proportional to physical properties of the gas. In order to define flow feature of a low-pressure gas inside the micro gas actuator, high order equation of Boltzmann is used to attain high precision results. To solve these equations, DSMC approach is used as a robust method for the non-equilibrium flow field. The effects of main factors such as length and gap of arms are comprehensively investigated in different ambient pressures. Furthermore, the effect of various concentrations of the CH4/He gas mixture on force generation is comprehensively studied. Our findings show that value of generated Knudsen force significantly different when the fraction of He in CH4/He gas mixture is varied. This indicates that this micro gas sensor could precisely detect the concentration of Helium gas inside a low-pressure CH4/He gas mixture.

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