A General Auto-Alignment Algorithm for Three-Degree Freedom Stage by Local Inverse Information with Regression Method
2018 ◽
Vol 6
(6)
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pp. 119
2019 ◽
1988 ◽
Vol 53
(6)
◽
pp. 1134-1140
2014 ◽
Vol 77
◽
pp. 285-299
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