It has been proved by large number of experiments that gas film damping has great influence on MEMS structures. Based on the elastic and material mechanics, this paper built a linear-vibration model for the electrostatic actuated micro-beam. According to the rarefied gas dynamics theory, a kind of modified Reynolds equation is adopted in the system modeling. In view of the study on small deflection of micro-beam has been investigated already by many researchers, this paper focus the research on large beam deflections, i.e. the mid-point deflection can be compared with the thickness of the gas film. The dynamic characteristics of micro-beam are investigated through coupling the dynamic vibration equation with the modified Reynolds equation. Through the finite difference method, the discrete form of the coupled dynamic equations has been obtained.
Dynamic Coupling Characteristics of the Crankshaft System
