Thin-film Characterization
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AbstractThe third intended application for the proposed dispersion-encoded low-coherence interferometry is the evaluation of thin-film characteristics on substrate materials. Due to the usage of thin-film technologies in high-volume production in e.g. the photovoltaics and semiconductor industry, process monitoring becomes relevant in order to ensure functional parameters such as solar cell efficiency, [289]. In this context, film thickness as well as film homogeneity over large areas are important criteria for quality assurance.
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2013 ◽
Vol 61
(8)
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pp. 4363-4366
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2019 ◽
2009 ◽
Vol 26
(2)
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pp. 30-33
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