CoFabs: An Interactive Fabrication Process Framework

2020 ◽  
pp. 271-292
Author(s):  
Teng-Wen Chang ◽  
Chi-Fu Hsiao ◽  
Chun-Yen Chen ◽  
Hsin-Yi Huang
Keyword(s):  
Fabrication Process ◽  
Process Framework

Linewidth measurement using the low voltage SEM

1986 ◽  
Vol 44 ◽  
pp. 652-653
Author(s):  
M.G. Rosenfield
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Integrated Circuits ◽  
Secondary Electron ◽  
Low Voltage ◽  
Fabrication Process ◽  
Critical Dimensions ◽  
Linewidth Measurement ◽  
Threshold Technique ◽  
Scanning Electron

Minimum feature sizes in experimental integrated circuits are approaching 0.5 μm and below. During the fabrication process it is usually necessary to be able to non-destructively measure the critical dimensions in resist and after the various process steps. This can be accomplished using the low voltage SEM. Submicron linewidth measurement is typically done by manually measuring the SEM micrographs. Since it is desirable to make as many measurements as possible in the shortest period of time, it is important that this technique be automated.Linewidth measurement using the scanning electron microscope is not well understood. The basic intent is to measure the size of a structure from the secondary electron signal generated by that structure. Thus, it is important to understand how the actual dimension of the line being measured relates to the secondary electron signal. Since different features generate different signals, the same method of relating linewidth to signal cannot be used. For example, the peak to peak method may be used to accurately measure the linewidth of an isolated resist line; but, a threshold technique may be required for an isolated space in resist.

A Sample Assessment Using the Four Process Framework

2001 ◽  
Author(s):  
Russell Almond ◽  
Linda Steinberg ◽  
Robert Mislevy
Keyword(s):  
Process Framework

INTEGRATED FABRICATION PROCESS FOR SOLID OXIDE FUELCELLS USING HYBRID PLASMA SPRAYING

1997 ◽  
Vol 1 (1) ◽  
pp. 41-47 ◽  
Author(s):  
Noriyuki Nomoto ◽  
Yoshitomi Okazaki ◽  
Kenji Kuroda ◽  
Shunji Takenoiri ◽  
Toyonobu Yoshida
Keyword(s):  
Plasma Spraying ◽  
Solid Oxide ◽  
Fabrication Process ◽  
Hybrid Plasma

THE CONTENT OF THE PROCESS FRAMEWORK FOR THE SOCIAL COMPETENCE FORMATION IN SENIOR SCHOOL STUDENTS

2020 ◽  
Vol 4 (97) ◽  
pp. 202-210
Author(s):  
Natalia V. Bushnaya
Keyword(s):  
Social Competence ◽  
Social Problems ◽  
Educational Environment ◽  
School Students ◽  
The Social ◽  
Process Framework ◽  
Senior Students

Social competence of senior school students serves as their integrative characteristic and acts as the result of education. The formation of social competence in senior students is realized in the school educational environment by means of solving social problems of personal, public and life-futurological content. School educational environment incorporates definite zones which act as incentives to motivate and involve students into the activity of formulating and solving social problems.

Quality Controlled process framework for Procurement and Purchase System

2018 ◽  
Vol 6 (6) ◽  
pp. 1574-1578
Author(s):  
Ravindra Yadav ◽  
◽  
◽  
◽  
◽  
...  
Keyword(s):  
Process Framework

The Psychology of Knowledge Ascriptions

2017 ◽  
Author(s):  
Mikkel Gerken
Keyword(s):  
Mental State ◽  
Dual Process ◽  
Empirical Psychology ◽  
Knowledge Ascription ◽  
Knowledge Ascriptions ◽  
Process Framework ◽  
Intuitive Judgments ◽  
Ordinary Knowledge

Chapter 5 surveys some empirical psychology and outlines some folk epistemological principles. By considering the heuristic and biases tradition, it is argued that ordinary knowledge ascriptions are standardly driven by heuristic processes and, therefore, associated with biases. This idea is integrated with a dual process framework for mental state ascriptions. On this basis, some of the central heuristic principles that govern intuitive judgments about knowledge ascriptions are articulated, and some of the biases associated with these principles are identified. The result is an account of an epistemic focal bias in intuitive judgments about knowledge ascription. Thus, Chapter 5 provides both a survey of relevant psychology and a development of the folk psychological principles governing knowledge ascriptions.

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