Epitaxial growth of YBa2Cu3O7?? superconducting thin films by DC magnetron sputtering using a partially melted sintered target

1992 ◽  
Vol 54 (3) ◽  
pp. 303-307 ◽  
Author(s):  
C. X. Ren ◽  
G. L. Chen ◽  
J. M. Chen ◽  
Y. J. Li ◽  
J. Yang ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Superconducting Thin Films ◽  
Dc Magnetron Sputtering

Epitaxial Growth of Bi 2 Sr 2-x La x Cu 1 O 6+δ Thin Films by In-Situ dc Magnetron Sputtering

1998 ◽  
Vol 15 (5) ◽  
pp. 373-375 ◽  
Author(s):  
Ying-zi Zhang ◽  
Duo-gui Yang ◽  
Lin Li ◽  
Bai-ru Zhao ◽  
Shun-lian Jia ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Dc Magnetron Sputtering

scholarly journals Effect of Aluminum Nitride Buffer Layer Deposited by Molecular Beam Epitaxy on the Growth of Aluminum Nitride Thin Films Deposited by DC Magnetron Sputtering Technique

2021 ◽  
Author(s):  
B. Riah ◽  
Julien Camus ◽  
Abdelhak Ayad ◽  
Mohammad Rammal ◽  
Raouia Zernadji ◽  
...  
Keyword(s):  
Thin Films ◽  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Aluminum Nitride ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Buffer Layer ◽  
Molecular Beam ◽  
Dc Magnetron Sputtering ◽  
Aln Buffer

This paper reports the effect of silicon substrate orientation and aluminum nitride buffer layer deposited by molecular beam epitaxy on the growth of aluminum nitride thin films deposited by DC magnetron sputtering technique at low temperature. The structural analysis has revealed a strong (0001) fiber texture for both substrates Si (100) and (111) and a hetero-epitaxial growth on few nanometers AlN buffer layer grown by MBE on Si (111) substrate. SEM images and XRD characterization have shown an enhancement in AlN crystallinity thanks to AlN (MBE) buffer layer. Raman spectroscopy indicated that the AlN film was relaxed when it deposited on Si (111), in compression on Si (100) and under tension on AlN buffer layer grown by MBE/Si (111) substrates, respectively. The interface between Si (111) and AlN grown by MBE is abrupt and well defined; contrary to the interface between AlN deposited using PVD and AlN grown by MBE. Nevertheless, AlN hetero-epitaxial growth was obtained at low temperature (<250°C).

DC magnetron sputtering of high Tc superconducting thin films

1987 ◽  
Vol 64 (5) ◽  
pp. 749-751 ◽  
Author(s):  
D.S. Burbidge ◽  
S.K. Dew ◽  
B.T. Sullivan ◽  
N. Fortier ◽  
R.R. Parsons ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Superconducting Thin Films ◽  
Dc Magnetron Sputtering ◽  
High Tc

Bi‐Sr‐Ca‐Cu‐oxide superconducting thin films deposited by dc magnetron sputtering

1988 ◽  
Vol 52 (23) ◽  
pp. 1992-1994 ◽  
Author(s):  
Brian T. Sullivan ◽  
N. R. Osborne ◽  
W. N. Hardy ◽  
J. F. Carolan ◽  
B. X. Yang ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Superconducting Thin Films ◽  
Dc Magnetron Sputtering

Superconducting Thin Films of Bi-Pb-Sr-Ca-Cu-O by dc Magnetron Sputtering from a Single Target

1988 ◽  
Vol 27 (Part 2, No. 11) ◽  
pp. L2091-L2093 ◽  
Author(s):  
Yoshinori Hakuraku ◽  
Yoshinari Aridome ◽  
Tetsuya Ogushi
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Superconducting Thin Films ◽  
Dc Magnetron Sputtering ◽  
Single Target

Preparation of superconducting thin films of YBa2Cu3O7, by dc-magnetron-sputtering

1988 ◽  
Vol 153-155 ◽  
pp. 782-783 ◽  
Author(s):  
P. Schmitt ◽  
H. Adrian ◽  
W. Gerhauser ◽  
W. Mohle ◽  
B. Hensel
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Superconducting Thin Films ◽  
Dc Magnetron Sputtering

GROWTH AND PROPERTIES OF YBCO SUPERCONDUCTING THIN FILMS PREPARED BY DC MAGNETRON SPUTTERING FROM A PAIR OF SUPERCONDUCTING STOICHIOMETRIC YBCO TARGETS

1989 ◽  
Vol 03 (01) ◽  
pp. 31-35
Author(s):  
S.L. YAN ◽  
C.G. LIANG ◽  
R.X. HAN ◽  
B.X. YU ◽  
W.Y. LIU ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Xrd Analysis ◽  
Superconducting Films ◽  
Onset Temperature ◽  
Radial Position ◽  
Superconducting Thin Films ◽  
Dc Magnetron Sputtering ◽  
Polycrystalline Structure ◽  
Post Annealing

Superconducting YBCO thin films have been fabricated by dc magnetron sputtering from a pair of stoichiometric YBCO superconducting targets on polycrystalline ZrO 2 substrates. The post-annealing superconducting films exhibit the properties with the critical onset temperature of 95 K and zero resistivity temperature at 83 K. The relation between the composition of the film and the radial position of the substrate is investigated. The XRD analysis proved that the films are mainly orthorhombic polycrystalline structure.

Preparing transparent cobalt-doped ZnO thin films by DC magnetron sputtering

2017 ◽  
Vol 4 (5) ◽  
pp. 6311-6316 ◽  
Author(s):  
Pongladda Panyajirawut ◽  
Nattha Pratumsuwan ◽  
Kornkamon Meesombad ◽  
Kridsana Thanawattana ◽  
Artit Chingsungnoen ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno
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