GROWTH AND PROPERTIES OF YBCO SUPERCONDUCTING THIN FILMS PREPARED BY DC MAGNETRON SPUTTERING FROM A PAIR OF SUPERCONDUCTING STOICHIOMETRIC YBCO TARGETS

Superconducting YBCO thin films have been fabricated by dc magnetron sputtering from a pair of stoichiometric YBCO superconducting targets on polycrystalline ZrO 2 substrates. The post-annealing superconducting films exhibit the properties with the critical onset temperature of 95 K and zero resistivity temperature at 83 K. The relation between the composition of the film and the radial position of the substrate is investigated. The XRD analysis proved that the films are mainly orthorhombic polycrystalline structure.

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SPUTTERING DEPOSITION OF Tl–Ca–Ba–Cu–O THIN FILMS WITH ZERO RESISTANCE AT 101 K

Modern Physics Letters B ◽

10.1142/s0217984989001576 ◽

1989 ◽

Vol 03 (13) ◽

pp. 1013-1016 ◽

Cited By ~ 6

Author(s):

S. L. YAN ◽

X. J. HU ◽

Q. X. SONG ◽

H. L. CAO ◽

J. YAN ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Surface Structure ◽

Single Phase ◽

Xrd Analysis ◽

Dc Magnetron Sputtering ◽

Ceramic Substrates ◽

Sputtering Deposition ◽

Post Annealing ◽

Zero Resistance

Superconducting Tl–Ca–Ba–Cu–O thin films have been prepared by dc magnetron sputtering from a pair of Tl 2 Ca 1 Ba 3 Cu 4 O y bulk targets. The post-annealing films on ZrO 2 ceramic substrates exhibit an onset temperature of about 125 K and zero resistance as high as 101 K. SEM showed a smooth terraced surface structure. The XRD analysis proved that the films were polycrystalline and were not single phase superconducting material.

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In Situ Epitaxial Growth of the Gd-Ba-Cu-O Superconducting Thin Films on (100) LaAlO3 by Dc-Magnetron Sputtering Using Single Planar Target

Science and Technology of Thin Film Superconductors 2 ◽

10.1007/978-1-4684-1345-8_14 ◽

1990 ◽

pp. 103-107

Author(s):

H. C. Li ◽

H. R. Yi ◽

R. L. Wang ◽

G. N. Zhou ◽

Y. Chen ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Epitaxial Growth ◽

Superconducting Thin Films ◽

Dc Magnetron Sputtering ◽

Planar Target

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Epitaxial growth of YBa2Cu3O7?? superconducting thin films by DC magnetron sputtering using a partially melted sintered target

Applied Physics A Solids and Surface ◽

10.1007/bf00323855 ◽

1992 ◽

Vol 54 (3) ◽

pp. 303-307 ◽

Cited By ~ 3

Author(s):

C. X. Ren ◽

G. L. Chen ◽

J. M. Chen ◽

Y. J. Li ◽

J. Yang ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Epitaxial Growth ◽

Superconducting Thin Films ◽

Dc Magnetron Sputtering

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PREPARATION OF SUPERCONDUCTING Bi–Pb–Sr–Ca–Cu–O FILMS BY DC MAGNETRON SPUTTERING METHOD

Modern Physics Letters B ◽

10.1142/s0217984990001045 ◽

1990 ◽

Vol 04 (13) ◽

pp. 847-853

Author(s):

Y.H. WANG ◽

Y.Z. ZHANG ◽

Y.Y. ZHAO ◽

X.G. QIU ◽

P. XU ◽

...

Keyword(s):

Thin Films ◽

Critical Current Density ◽

Magnetron Sputtering ◽

Current Density ◽

High Current Density ◽

High Current ◽

Dc Magnetron Sputtering ◽

Sharp Transition ◽

Interesting Phenomenon ◽

Post Annealing

Superconducting Bi–Pb–Sr–Ca–Cu–O thin films of zero resistivity temperature 108 K and critical current density of 1000 A/cm2 (at 77 K) were deposited on MgO(100) single-crystal substrates by DC magnetron sputtering. After depositing at 350–400°C and post annealing at 837.5°C for 1–5 hours in air, with different cooling rate we got highly c-axis oriented thin films which show zero resistivity at 103 K, 108 K. The results we got show an interesting phenomenon: the mixture of high and low Tc phase exhibit a low onset, sharp transition and high current density.

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Raman scattering from sputtered films of YBa2Cu3Oy

Canadian Journal of Physics ◽

10.1139/p88-115 ◽

1988 ◽

Vol 66 (8) ◽

pp. 695-699 ◽

Cited By ~ 5

Author(s):

J. Chrzanowski ◽

J. C. Irwin ◽

R. R. Parsons ◽

P. J. Mulhern

Keyword(s):

Thin Films ◽

High Temperature ◽

Magnetron Sputtering ◽

Raman Scattering ◽

Oxygen Content ◽

High Temperature Superconductor ◽

Superconducting Films ◽

Vibrational Modes ◽

Dc Magnetron Sputtering ◽

Sputtered Films

Thin films of the high-temperature superconductor YBa2Cu3Oy have been deposited on Al2O3 and MgO substrates by dc magnetron sputtering. Raman-scattering experiments have been carried out on these films at various temperatures. The results of these experiments have been used to estimate the amount of impurity phases in the films, to characterize the actual superconducting films, and to test for any preferential orientation within the film. Vibrational modes of the superconductor were found at 148, 226, and 338 cm−1 in both sets of films, at 446 and 491 cm−1 in the Al2O3 films, and at 441 and 500 cm−1 in the MgO films. The measured frequencies of the highest energy modes have been used to determine the oxygen content of the films.

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The effect of post-annealing under CdCl2 atmosphere on the properties of ITO thin films deposited by DC magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-009-9932-1 ◽

2009 ◽

Vol 21 (5) ◽

pp. 441-444 ◽

Cited By ~ 2

Author(s):

Shenghao Wang ◽

Jingquan Zhang ◽

Bo Wang ◽

Lianghuan Feng ◽

Yaping Cai ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Post Annealing ◽

Ito Thin Films

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Effect of Annealing Temperature on Platinum/YSZ Thin Film Fabricated Using RF and DC Magnetron Sputtering

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.268.229 ◽

2017 ◽

Vol 268 ◽

pp. 229-233

Author(s):

A.R. Nurhamizah ◽

Zuhairi Ibrahim ◽

Rosnita Muhammad ◽

Yussof Wahab ◽

Samsudi Sakrani

Keyword(s):

Thin Film ◽

Thin Films ◽

Magnetron Sputtering ◽

Annealing Temperature ◽

X Ray Diffraction ◽

Dc Magnetron Sputtering ◽

X Ray ◽

Post Annealing ◽

Two Temperatures ◽

Platinum Thin Film

This research aims to study the growth and the effect of annealing temperature on the structural properties of Platinum/YSZ/Platinum thin film. The thin films were prepared by RF and DC magnetron sputtering method utilized platinum as electrodes (anode and cathode) and YSZ as electrolyte. Two temperatures of annealing (400 and 600 °C) were conducted onto Platinum/YSZ/Platinum thin film for comparison in this study. Crystalline phase, microstructure and thickness of thin films were evaluated using X-Ray Diffraction (XRD) and Field Emission Scanning Electron Microscope (FE-SEM) technique. Results show that Pt/YSZ/Pt thin film without post-annealing gives a better morphology and crystal phase.

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