Effect of post-deposition heat-treatment on physical properties of tin oxide thin films prepared by an electron-beam evaporation technique

1993 ◽  
Vol 12 (12) ◽  
pp. 949-951 ◽  
Author(s):  
S. M. Rozati ◽  
S. Mirzapour ◽  
M. G. Takwale ◽  
B. R. Marathe ◽  
V. G. Bhide
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Electron Beam ◽  
Physical Properties ◽  
Tin Oxide ◽  
Electron Beam Evaporation ◽  
Oxide Thin Films ◽  
Electron Beam Evaporation Technique ◽  
Evaporation Technique ◽  
Post Deposition

Preparation and characterization of indium zinc oxide thin films by electron beam evaporation technique

2011 ◽  
Vol 46 (4) ◽  
pp. 615-620 ◽  
Author(s):  
Reza Keshavarzi ◽  
Valiollah Mirkhani ◽  
Majid Moghadam ◽  
Shahram Tangestaninejad ◽  
Iraj Mohammadpoor-Baltork ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Oxide Thin Films ◽  
Indium Zinc Oxide ◽  
Electron Beam Evaporation Technique ◽  
Evaporation Technique

Influence of Substrate Temperature on Tin Oxide Thin Films Deposited by Electron Beam Evaporation Technique

1992 ◽  
Vol 242 ◽  
Author(s):  
S. M. Rozati ◽  
S. Mirzapour ◽  
M. G. Takwale ◽  
B. R. Marathe ◽  
V. G. Bhide
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Electron Beam Evaporation ◽  
Electron Beam Evaporation Technique ◽  
Evaporation Technique ◽  
Influence Of Substrate ◽  
Tin Oxide Films ◽  
Deposited Films

ABSTRACTTransparent conducting tin oxide films were prepared by an electron beam evaporation technique. As-deposited films were amorphous or polycrystalline depending on the substrate temperature and the time of deposition. In order to get transparent and conducting thin films of SnO2, as-deposited films were subjected to further heat-treatment in air at 650°C for 2 hours. Physical properties of as-deposited and annealed films are discussed with reference to substrate temperature and deposition time.

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