Simultaneous optimization in ultra-precision motion systems

2019 ◽  
Vol 59 (6) ◽  
pp. 2273-2285
Author(s):  
Jing Wang ◽  
Ming Zhang ◽  
Yu Zhu ◽  
Kaiming Yang ◽  
Xin Li ◽  
...  
Keyword(s):  
Simultaneous Optimization ◽  
Ultra Precision ◽  
Precision Motion

Integrated Optimization of Structure and Control in Ultra-Precision Motion Systems

2019 ◽  
Author(s):  
Jing Wang ◽  
Ming Zhang ◽  
Yu Zhu ◽  
Xin Li ◽  
Leijie Wang
Keyword(s):  
Complex Dynamics ◽  
System Level ◽  
Structural Topology ◽  
Worst Case ◽  
Integrated Optimization ◽  
Motion System ◽  
Material Interpolation ◽  
Ultra Precision ◽  
Precision Motion ◽  
And Control

Abstract Ever-increasing demands for precision and efficiency in ultra-precision motion systems will result in a lightweight and flexible motion system with complex dynamics. In this paper, a systematic approach is proposed where control gains, 3D structural topology and actuator configuration are integrated into optimization to derive a system-level optimal design which possesses a high vibration control performance, and still satisfies multiple design constraints. A material interpolation model with high accuracy is proposed for the integrated optimization, a simple integral equation utilizing R-functions and level-set functions is established to represent complex non-overlapping constraints of actuators. Over-actuation degrees are utilized to actively control the dominant flexible modes. Responses of residual flexible modes are restricted by increasing the coincidence of their nodal areas at actuators (sensors) locations. The objective function is the constructed worst-case vibration energy of the flexible modes. A dual-loop solving strategy combining the genetic algorithm and the modified optimal criteria method is adopted to solve the optimization problem. A fine stage in the wafer stage is designed to prove the effectiveness of the proposed method.

scholarly journals Iterative tuning notch filter for suppressing resonance in ultra-precision motion control

2016 ◽  
Vol 8 (11) ◽  
pp. 168781401667409 ◽  
Author(s):  
Wei Teng ◽  
Xiaolong Zhang ◽  
Yangyang Zhang ◽  
Liangliang Yang
Keyword(s):  
Motion Control ◽  
Notch Filter ◽  
Precision Motion Control ◽  
Ultra Precision ◽  
Precision Motion

Roll Vibration Analysis of Planar Aerostatic Bearings through a Distributed Spring Model

2011 ◽  
Vol 346 ◽  
pp. 332-338
Author(s):  
Wei Jiang ◽  
Wen Chuan Jia ◽  
Shan Shan Liu ◽  
Yuan Tai Hu ◽  
Hong Ping Hu
Keyword(s):  
Working Conditions ◽  
Spring Model ◽  
Aerostatic Bearing ◽  
Normal Stiffness ◽  
Ultra Precision ◽  
Aerostatic Bearings ◽  
Precision Motion ◽  
And Control ◽  
Distributed Spring Model ◽  
Stiffness Distribution

The aerostatic bearings used in guide ways in ultra precision motion stages can provide both normal stiffness and roll stiffness, which are critical to the dynamic characteristics and control of systems. The normal stiffness has been widely investigated so far, but the roll one has seldom been studied. A new method for analyzing the roll stiffness is proposed, in which the aerostatic bearing is modeled as a set of distributed springs. The stiffness distribution is obtained by using the derivate of the pressure distribution with respect to the air gap. All the distributed springs are then integrated by using the presented transformation and it leads to an equivalent spatial spring which contains both the normal stiffness and the roll stiffness. A planar aerostatic bearing is taken as an example to illustrate the procedure of the calculation. The proposed method can be used to predict the vibration characteristics of various kinds of aerostatic bearings under working conditions.

Sign in / Sign up

Export Citation Format

Share Document