Numerical investigation into dynamic behavior of electrostatically-actuated circular clamped micro-plate subject to squeeze-film damping effect

2015 ◽  
Vol 23 (2) ◽  
pp. 277-283
Author(s):  
Chin-Chia Liu
Keyword(s):  
Numerical Investigation ◽  
Dynamic Behavior ◽  
Squeeze Film ◽  
Electrostatically Actuated ◽  
Damping Effect ◽  
Squeeze Film Damping

Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect

2015 ◽  
Vol 23 (2) ◽  
pp. 411-419 ◽  
Author(s):  
Weimin Wang ◽  
Fenggang Tao ◽  
Qiang Wang ◽  
Chuankai Qiu ◽  
Zexiang Chen ◽  
...  
Keyword(s):  
Dynamic Behavior ◽  
Parallel Plate ◽  
Squeeze Film ◽  
Damping Effect ◽  
Squeeze Film Damping

Squeeze film damping effect on the dynamic response of a MEMS torsion mirror

1998 ◽  
Vol 8 (3) ◽  
pp. 200-208 ◽  
Author(s):  
Feixia Pan ◽  
Joel Kubby ◽  
Eric Peeters ◽  
Alex T Tran ◽  
Subrata Mukherjee
Keyword(s):  
Dynamic Response ◽  
Squeeze Film ◽  
Damping Effect ◽  
Squeeze Film Damping

scholarly journals Squeeze Film Damping Effect on Different Microcantilever Probes in Tapping Mode Atomic Force Microscope

Scanning ◽  
2020 ◽  
Vol 2020 ◽  
pp. 1-6
Author(s):  
Yan Sun ◽  
Jing Liu ◽  
Kejian Wang ◽  
Zheng Wei
Keyword(s):  
Atomic Force Microscope ◽  
Theoretical Models ◽  
Sample Surface ◽  
Squeeze Film ◽  
Simplified Models ◽  
Tapping Mode ◽  
Damping Effect ◽  
Atomic Force ◽  
Squeeze Film Damping

During the operation of tapping mode atomic force microscope (TM-AFM), the gap between the cantilever and sample surface is very small (several nanometers to micrometers). Owing to the small gap distance and high vibration frequency, squeeze film force should be considered in TM-AFM. To explore the mechanism of squeeze film damping in TM-AFM, three theoretical microcantilever simplified models are discussed innovatively herein: tip probe, ball probe, and tipless probe. Experiments and simulations are performed to validate the theoretical models. It is of great significance to improve the image quality of atomic force microscope.

Dynamic Behavior of Condenser Microphone Under the Influence of Squeeze Film Damping

2018 ◽  
Author(s):  
Siti Aisyah Zawawi ◽  
Azrul Azlan Hamzah ◽  
Reena Sri Selvarajan ◽  
Burhanuddin Yeop Majlis ◽  
Faisal Mohd-Yasin
Keyword(s):  
Dynamic Behavior ◽  
Squeeze Film ◽  
Squeeze Film Damping ◽  
Condenser Microphone
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