Plasma exposure inducing crystallization of indium oxide film with improved electrical and mechanical properties at room temperature
2014 ◽
Vol 49
(17)
◽
pp. 5955-5960
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Keyword(s):
1999 ◽
Vol 1
(5)
◽
pp. 215
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1998 ◽
Vol 333
(1-2)
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pp. 150-156
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Keyword(s):
Keyword(s):
1993 ◽
Vol 32
(Part 1, No. 10)
◽
pp. 4732-4736
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1998 ◽
Vol 54
(1-3)
◽
pp. 258-261
◽
2021 ◽
Vol 39
(3)
◽
pp. 032406
Keyword(s):