Fabrication of large-area nano-scale patterned sapphire substrate with laser interference lithography

2014 ◽  
Vol 10 (1) ◽  
pp. 51-54 ◽  
Author(s):  
Ming-dong Xuan ◽  
Long-gui Dai ◽  
Hai-qiang Jia ◽  
Hong Chen
Keyword(s):  
Sapphire Substrate ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area ◽  
Patterned Sapphire Substrate ◽  
Nano Scale

Large-area two-dimensional silicon photonic crystals for infrared light fabricated with laser interference lithography

2004 ◽  
Vol 15 (5) ◽  
pp. 639-642 ◽  
Author(s):  
L Prodan ◽  
T G Euser ◽  
H A G M van Wolferen ◽  
C Bostan ◽  
R M de Ridder ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Infrared Light ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Two Dimensional ◽  
Laser Interference ◽  
Large Area ◽  
Silicon Photonic

scholarly journals The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography

Nanomaterials ◽  
2019 ◽  
Vol 9 (1) ◽  
pp. 73 ◽  
Author(s):  
Jun Wu ◽  
Zhaoxin Geng ◽  
Yiyang Xie ◽  
Zhiyuan Fan ◽  
Yue Su ◽  
...  
Keyword(s):  
Indium Tin Oxide ◽  
Splitting Method ◽  
Vertical Direction ◽  
Interference Lithography ◽  
Wearable Electronics ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area ◽  
Periodic Nanostructures ◽  
Ito Glass

We report a method for fabricating periodic nanostructures on the surface of polydimethylsiloxane (PDMS) using laser interference lithography. The wave-front splitting method was used for the system, as the period and duty cycle can be easily controlled. Indium tin oxide (ITO) glass reveals favorable characteristics for controlling the standing waves distributed in the vertical direction, and was selected as the rigid substrate for the curing of the PDMS prepolymer, photoresist spin coating, and exposure processes. Periodic nanostructures such as gratings, dot, and hole arrays were prepared. This efficient way of fabricating large area periodic nanoscale patterns will be useful for surface plasmonic resonance and wearable electronics.

Large area metal micro-/nano-groove arrays with both structural color and anisotropic wetting fabricated by one-step focused laser interference lithography

Nanoscale ◽  
2019 ◽  
Vol 11 (11) ◽  
pp. 4803-4810 ◽  
Author(s):  
Hao Wu ◽  
Yunlong Jiao ◽  
Chenchu Zhang ◽  
Chao Chen ◽  
Liang Yang ◽  
...  
Keyword(s):  
Metal Surfaces ◽  
Structural Color ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area ◽  
One Step

Colorful and anisotropic multi-functional metal surfaces fabricated by focused laser interference lithography.

Fabrication of large-area periodic nanostructures using two-mirror laser interference lithography

2013 ◽  
Vol 9 (6) ◽  
pp. 879-882 ◽  
Author(s):  
Jongseok Kim ◽  
Il Gyu Jeong ◽  
Sang Ho Lee ◽  
Kyung Tae Kang ◽  
Sung Ho Lee
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area ◽  
Periodic Nanostructures

scholarly journals Large-Area Printed Broadband Membrane Reflectors by Laser Interference Lithography

2013 ◽  
Vol 5 (1) ◽  
pp. 2200106-2200106 ◽  
Author(s):  
Jung-Hun Seo ◽  
Jungho Park ◽  
Deyin Zhao ◽  
Hongjun Yang ◽  
Weidong Zhou ◽  
...  
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area
Sign in / Sign up

Export Citation Format

Share Document