The effect of TiC transient layer on a DLC-based functionally gradient coating prepared by closed field unbalanced magnetron sputtering plating system

2010 ◽  
Vol 16 (4) ◽  
pp. 573-580 ◽  
Author(s):  
Ferhat Bülbül ◽  
İhsan Efeoğlu
Keyword(s):  
Magnetron Sputtering ◽  
Closed Field ◽  
Transient Layer ◽  
Unbalanced Magnetron Sputtering ◽  
Functionally Gradient ◽  
Gradient Coating ◽  
Unbalanced Magnetron

Effect of Temperature on Structure and Mechanical Properties of CrN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering

2013 ◽  
Vol 591 ◽  
pp. 190-193
Author(s):  
Hao Zhang ◽  
Shu Wang Duo ◽  
Xiang Min Xu ◽  
Ting Zhi Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Grain Shape ◽  
Effect Of Temperature ◽  
Closed Field ◽  
Columnar Crystal ◽  
Crn Coating ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Crn Coatings

CrN coatings were fabricated by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of substrate temperature (TS) on phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the phase in coatings, which has little to do with TS, was the coexistence of Cr, Cr2N and CrN. The grain shape of the columnar crystal CrN coating was the coexistence of pyramidal and plane topography. The hardness and adhension of CrN coating first increased with the rise of temperature, then decreased when the values of both them were constant ones. It has the highest hardness and bonding strength simultaneously at 300°C.

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