High Efficiency Precision Grinding of Micro-structured SiC Surface Using Laser Micro-structured Coarse-Grain Diamond Grinding Wheel

A grinding wheel wears rapidly during ultrasonic assisted surface generation of a large aperture aspherical RB-SiC mirror, which leads to an increase of grinding force and profile error. In this paper, different types of resinoid bonded diamond grinding wheel with a same grit size were dressed with high-pressure abrasive water jet. The dressing effects of abrasive water jet were assessed through comparing the 3D roughness of the grinding wheel topographies before and after dressing. The experimental results show that diamond grits of a worn grinding wheel are protruding from bond after dressing. The feed rate of nozzle and the bond materials have significant impact on the 3D surface roughness of the wheel and dressing efficient. The softer binder and the decrease of the feed rates and lead to deeper grooves during dressing of grinding wheel. However, too low feed rate will make a large number of abrasive particles drop from binder, which worsens the wheel topography. Therefore, to dress grinding wheel well and efficiently, optimized feed rate must be chosen.

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Surface Layer Damage of Quartz Glass Induced by Ultra-Precision Grinding with Different Grit Size

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.872.19 ◽

2017 ◽

Vol 872 ◽

pp. 19-24

Author(s):

Zong Chao Geng ◽

Shang Gao ◽

Ren Ke Kang ◽

Zhi Gang Dong

Keyword(s):

Surface Roughness ◽

Quartz Glass ◽

Subsurface Damage ◽

Grinding Wheel ◽

Precision Grinding ◽

Diamond Grinding Wheel ◽

Diamond Grinding ◽

Roughness Surface ◽

Ultra Precision ◽

Damage Depth

Quartz glass is a typical hard and brittle material. During the manufacturing process of quartz glass components, ultra-precision grinding is widely used due to its high throughput and good dimensional accuracies. However, grinding will unavoidably induce large surface and subsurface damage. In this study, the surface and subsurface damage characteristics of quartz glass substrates ground by diamond wheels with different grit sizes were investigated in terms of surface roughness, surface topography, subsurface microcrack characteristic, and subsurface damage depth. Discussion was also provided to explore corresponding reasons of surface and subsurface damage induced by diamond grinding wheels with different grit sizes of #1500 and #2000. The experiment results showed that the surface roughness, surface damage, and subsurface damage depth induced by #2000 quartz glass was ground by #1500 diamond grinding wheel, and in ductile mode when ground by #2000 diamond grinding wheel.

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Precision grinding of a microstructured surface on hard and brittle materials by a microstructured coarse-grained diamond grinding wheel

Ceramics International ◽

10.1016/j.ceramint.2018.01.243 ◽

2018 ◽

Vol 44 (7) ◽

pp. 8026-8034 ◽

Cited By ~ 17

Author(s):

Mingtao Wu ◽

Bing Guo ◽

Qingliang Zhao ◽

Ping He

Keyword(s):

Brittle Materials ◽

Coarse Grained ◽

Grinding Wheel ◽

Precision Grinding ◽

Diamond Grinding Wheel ◽

Diamond Grinding ◽

Microstructured Surface ◽

Hard And Brittle Materials

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3D laser investigation on micron-scale grain protrusion topography of truncated diamond grinding wheel for precision grinding performance

International Journal of Machine Tools and Manufacture ◽

10.1016/j.ijmachtools.2011.01.010 ◽

2011 ◽

Vol 51 (5) ◽

pp. 411-419 ◽

Cited By ~ 35

Author(s):

J. Xie ◽

F. Wei ◽

J.H. Zheng ◽

J. Tamaki ◽

A. Kubo

Keyword(s):

Grinding Wheel ◽

Precision Grinding ◽

Diamond Grinding Wheel ◽

Diamond Grinding ◽

Grinding Performance

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Precision form Grinding of Ceramic Materials with Diamond Grinding Wheel

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.359-360.90 ◽

2007 ◽

Vol 359-360 ◽

pp. 90-93

Author(s):

Zhong Ming Cui ◽

Deng Jie Zhu ◽

Lei Du

Keyword(s):

High Efficiency ◽

Ceramic Materials ◽

Diamond Wheel ◽

Machining Process ◽

Grinding Wheel ◽

Grinding Process ◽

Abrasive Wheel ◽

Diamond Grinding Wheel ◽

Diamond Grinding ◽

Form Grinding

Ceramic is difficult to cut with normal machining method in precision intricate profile. The grinding process with diamond abrasive wheel is an effective process to machining ceramic materials. In this paper, a precise form-grinding method of ceramic materials with diamond grinding wheel is introduced. The tolerance of intricate profiler precision degree by this grinding process is less than 0.005mm. The machining process contains many techniques as high efficiency of profiler dressing technique of diamond wheel and form grinding process of ceramic. It gives some references on the developing of ceramic precision intricate profile machining techniques forward.

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Investigation of tribological conditions on grinding of bioceramic material using diamond grinding wheel under different cooling and lubrication environment

Journal of Manufacturing Processes ◽

10.1016/j.jmapro.2021.09.004 ◽

2021 ◽

Vol 71 ◽

pp. 550-564

Author(s):

N. Arunachalam ◽

P. Suya Prem Anand ◽

L. Vijayaraghavan

Keyword(s):

Grinding Wheel ◽

Diamond Grinding Wheel ◽

Diamond Grinding ◽

Cooling And Lubrication

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Characteristics of the Wheel Surface Topography in Ultra-precision Grinding of Silicon Wafers

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.389-390.36 ◽

2008 ◽

Vol 389-390 ◽

pp. 36-41

Author(s):

Feng Wei Huo ◽

Dong Ming Guo ◽

Ren Ke Kang ◽

Zhu Ji Jin

Keyword(s):

Surface Topography ◽

Sampling Interval ◽

Grinding Wheel ◽

Height Distribution ◽

Wheel Surface ◽

Diamond Grinding Wheel ◽

Diamond Grinding ◽

Cutting Surface ◽

Ultra Precision ◽

Cutting Direction

A 3D profiler based on scanning white light interferometry with a lateral sampling interval of 0.11μm was introduced to measure the surface topography of a #3000 diamond grinding wheel, and a large sampling area could be achieved by its stitching capability without compromising its lateral or vertical resolution. The protrusion height distribution of diamond grains and the static effective grain density of the grinding wheel were derived, and the wheel chatter and the deformation of the wheel were analyzed as well. The study shows that the grain protrusion height obeys an approximate normal distribution, the static effective grain density is much lower than the theoretical density, and only a small number of diamond grains are effective in the grinding process with fine diamond grinding wheel. There exists waviness on the grinding wheel surface parallel with the wheel cutting direction. The cutting surface of the grinding wheel is not flat but umbilicate, which indicates that the elastic deformation at the wheel edges is much larger than in the center region.

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