Growth of hydrogenated amorphous silicon carbide films from hydrocarbon gas of methane series mixed with silane and their properties
1983 ◽
Vol 59-60
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pp. 553-556
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2011 ◽
Vol 276
◽
pp. 012173
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1998 ◽
Vol 37
(Part 1, No. 10)
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pp. 5480-5484
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2018 ◽
Vol 753
◽
pp. 320-328
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1982 ◽
Vol 21
(S1)
◽
pp. 297
◽
2013 ◽
Vol 270
◽
pp. 287-291
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2003 ◽
Vol 21
(4)
◽
pp. 1415
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