Ion-assisted deposition in unbalanced-magnetron sputtering systems

Materials Science and Engineering ◽

10.1016/0025-5416(93)90010-4 ◽

1993 ◽

Vol 163 (2) ◽

pp. 187-192 ◽

Author(s):

W Sproul

Keyword(s):

Magnetron Sputtering ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Deposition Behavior of Boron Carbide Thin Film Deposited by Unbalanced Magnetron Sputtering Method

Korean Journal of Metals and Materials ◽

10.3365/kjmm.2014.52.12.969 ◽

2014 ◽

Vol 52 (12) ◽

pp. 969-974

Author(s):

Young Joon Baik ◽

Kyung Eun Bae ◽

Jong Keuk Park ◽

Wook Seong Lee

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Boron Carbide ◽

Deposition Behavior ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

10.1117/12.2243831 ◽

2016 ◽

Author(s):

Eka Nurfani ◽

Angga Virdian ◽

Robi Kurniawan ◽

Shibghatullah Muhammady ◽

Inge M. Sutjahja ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Room Temperature ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Plasma Characteristics Related to Thin-Film Microstructures in Unbalanced Magnetron Sputtering Processes

Materials Science Forum ◽

10.4028/www.scientific.net/msf.102-104.563 ◽

1992 ◽

Vol 102-104 ◽

pp. 563-572 ◽

Author(s):

S.L. Rohde

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Plasma Characteristics

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TiN/NbN superlattice hard coatings deposited by unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/s0257-8972(98)00825-1 ◽

1999 ◽

Vol 113 (1-2) ◽

pp. 75-79 ◽

Author(s):

X.T. Zeng

Keyword(s):

Magnetron Sputtering ◽

Hard Coatings ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/s0257-8972(00)00675-7 ◽

2000 ◽

Vol 130 (1) ◽

pp. 64-68 ◽

Author(s):

Da-Yung Wang ◽

Chi-Lung Chang ◽

Cheng-Hsun Hsu ◽

Hua-Ni Lin

Keyword(s):

Magnetron Sputtering ◽

Hard Coatings ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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The structural characteristics of VOx films prepared by He-introduced reactive RF unbalanced magnetron sputtering

Thin Solid Films ◽

10.1016/0040-6090(96)08669-5 ◽

1996 ◽

Vol 281-282 ◽

pp. 436-440 ◽

Author(s):

H. Miyazaki ◽

F. Utsuno ◽

Y. Shigesato ◽

I. Yasui

Keyword(s):

Magnetron Sputtering ◽

Structural Characteristics ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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High rate reactive sputtering in an opposed cathode closed-field unbalanced magnetron sputtering system

Surface and Coatings Technology ◽

10.1016/0257-8972(90)90080-v ◽

1990 ◽

Vol 43-44 ◽

pp. 270-278 ◽

Author(s):

William D. Sproul ◽

Paul J. Rudnik ◽

Michael E. Graham ◽

Suzanne L. Rohde

Keyword(s):

Magnetron Sputtering ◽

Reactive Sputtering ◽

High Rate ◽

Closed Field ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Sputtering System

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Microstructure and friction behavior of LaF3 doped Ti-MoS2 composite thin films deposited by unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2018.12.041 ◽

2019 ◽

Vol 359 ◽

pp. 334-341 ◽

Author(s):

Chao Zhang ◽

Biqi Yang ◽

Jian Wang ◽

Huifen Wang ◽

Gang Liu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Friction Behavior ◽

Composite Thin Films ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Plasma source based on an unbalanced magnetron sputtering system

Journal of Physics Conference Series ◽

10.1088/1742-6596/830/1/012057 ◽

2017 ◽

Vol 830 ◽

pp. 012057 ◽

Author(s):

D P Borisov ◽

V A Slabodchikov ◽

V M Kuznetsov

Keyword(s):

Magnetron Sputtering ◽

Plasma Source ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Sputtering System

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Structural and mechanical properties of titanium–aluminium–nitride films deposited by reactive close-field unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2003.12.011 ◽

2004 ◽

Vol 185 (2-3) ◽

pp. 245-253 ◽

Author(s):

P.W Shum ◽

K.Y Li ◽

Z.F Zhou ◽

Y.G Shen

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Aluminium Nitride ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Titanium Aluminium

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