Characterization of defects due to low voltage thin film sputter deposition by means of the MIS junction
2013 ◽
Vol 34
(4)
◽
pp. 520-522
◽
Keyword(s):
1988 ◽
Vol 46
◽
pp. 866-867
1989 ◽
Vol 47
◽
pp. 562-563
Keyword(s):
1984 ◽
Vol 45
(C5)
◽
pp. C5-325-C5-327
2016 ◽
Vol 136
(10)
◽
pp. 437-442
◽
Keyword(s):
Keyword(s):