Analysis of a thin, silicon-oxide, silicon-nitride multilayer target by time-of-flight medium energy backscattering

1996 ◽  
Vol 118 (1-4) ◽  
pp. 556-559 ◽  
Author(s):  
Robert A. Weller ◽  
Kyle McDonald ◽  
Diane Pedersen ◽  
Joseph A. Keenan
Keyword(s):  
Silicon Nitride ◽  
Silicon Oxide ◽  
Time Of Flight ◽  
Medium Energy ◽  
Thin Silicon ◽  
Multilayer Target

Analysis of silicon–oxide–silicon nitride stacks by medium-energy ion scattering

2000 ◽  
Vol 18 (5) ◽  
pp. 2503 ◽  
Author(s):  
D. Landheer ◽  
P. Ma ◽  
W. N. Lennard ◽  
I. V. Mitchell ◽  
C. McNorgan
Keyword(s):  
Silicon Nitride ◽  
Silicon Oxide ◽  
Medium Energy ◽  
Ion Scattering ◽  
Medium Energy Ion Scattering

Growth mechanism of thin silicon oxide films on Si(100) studied by medium-energy ion scattering

1995 ◽  
Vol 52 (3) ◽  
pp. 1759-1775 ◽  
Author(s):  
E. P. Gusev ◽  
H. C. Lu ◽  
T. Gustafsson ◽  
E. Garfunkel
Keyword(s):  
Growth Mechanism ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Medium Energy ◽  
Ion Scattering ◽  
Thin Silicon ◽  
Medium Energy Ion Scattering

scholarly journals Suppression of interfacial voids formation during silane (SiH4)-based silicon oxide bonding with a thin silicon nitride capping layer

2018 ◽  
Vol 123 (1) ◽  
pp. 015302 ◽  
Author(s):  
Kwang Hong Lee ◽  
Shuyu Bao ◽  
Yue Wang ◽  
Eugene A. Fitzgerald ◽  
Chuan Seng Tan
Keyword(s):  
Silicon Nitride ◽  
Silicon Oxide ◽  
Capping Layer ◽  
Thin Silicon

ChemInform Abstract: VERY THIN SILICON NITRIDE FILMS GROWN BY DIRECT THERMAL REACTION WITH NITROGEN

1978 ◽  
Vol 9 (28) ◽  
Author(s):  
T. ITO ◽  
S. HIJIYA ◽  
T. NOZAKI ◽  
H. ARAKAWA ◽  
M. SHINODA ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Thermal Reaction ◽  
Silicon Nitride Films ◽  
Thin Silicon

scholarly journals A comparison study of boron emitter passivation by silicon oxide and a PECVD silicon nitride stack

2017 ◽  
Vol 124 ◽  
pp. 288-294 ◽  
Author(s):  
Barbora Mojrová ◽  
Haifeng Chu ◽  
Christop Peter ◽  
Pirmin Preis ◽  
Jan Lossen ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Silicon Oxide ◽  
Comparison Study

Adhesion of a thin silicon oxide film on a polycarbonate substrate

1993 ◽  
Vol 64-65 ◽  
pp. 849-856 ◽  
Author(s):  
S. Vallon ◽  
B. Drévillon ◽  
C. Sénémaud ◽  
A. Gheorghiu ◽  
V. Yakovlev
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Thin Silicon ◽  
Polycarbonate Substrate

Changes in the optical properties of films of silicon nitride, silicon oxinitride, and silicon oxide upon ion irradiation

1977 ◽  
Vol 26 (1) ◽  
pp. 129-131
Author(s):  
N. N. Gerasimenko ◽  
T. I. Kovalevskaya ◽  
V. G. Pan'kin ◽  
K. K. Svitashev ◽  
G. M. Tseitlin
Keyword(s):  
Optical Properties ◽  
Silicon Nitride ◽  
Silicon Oxide ◽  
Ion Irradiation
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