Low temperature growth of highly purified diamond films using microwave plasma-assisted chemical vapour deposition

1991 ◽  
Vol 47 (1-3) ◽  
pp. 1-12 ◽  
Author(s):  
Yasushi Muranaka ◽  
Hisao Yamashita ◽  
Hiroshi Miyadera
Keyword(s):  
Low Temperature ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapour ◽  
Temperature Growth ◽  
Low Temperature Growth

Low-temperature growth of graphene nanoplatelets by hot-wire chemical vapour deposition

2021 ◽  
Vol 411 ◽  
pp. 126995
Author(s):  
Nur Afira binti Anuar ◽  
Nurul Hidayah Mohamad Nor ◽  
Rozidawati binti Awang ◽  
Hideki Nakajima ◽  
Sarayut Tunmee ◽  
...  
Keyword(s):  
Low Temperature ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Graphene Nanoplatelets ◽  
Hot Wire ◽  
Temperature Growth ◽  
Low Temperature Growth

scholarly journals Publisher Correction: Characterization of nitrogen doped graphene bilayers synthesized by fast, low temperature microwave plasma-enhanced chemical vapour deposition

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
C. R. S. V. Boas ◽  
B. Focassio ◽  
E. Marinho ◽  
D. G. Larrude ◽  
M. C . Salvadori ◽  
...  
Keyword(s):  
Low Temperature ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Nitrogen Doped ◽  
Nitrogen Doped Graphene ◽  
Doped Graphene

An amendment to this paper has been published and can be accessed via a link at the top of the paper.

A Comparison of the Surface Properties of DLC and Nanocrystalline Diamond

2007 ◽  
Vol 336-338 ◽  
pp. 1776-1779
Author(s):  
Chong Mu Lee ◽  
Kyung Ha Kim
Keyword(s):  
Chemical Vapour Deposition ◽  
Amorphous Carbon ◽  
Photoelectron Spectroscopy ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapour ◽  
Scanning Force Microscopy ◽  
Nanocrystalline Diamond ◽  
Hard Coatings

Diamond-like carbon (DLC) films have been deposited by radio frequency plasma enhanced chemical vapour deposition (rf-PECVD) with different Ar-CH4 mixtures. Nanocrystalline diamond films have been deposited by microwave plasma-enhanced chemical vapour deposition (MPCVD), using Ar-H2-CH4 mixtures. X-ray photoelectron spectroscopy (XPS) and nanotribological investigation (by scanning force microscopy) have been used to compare the mechanical properties and structures of these films. Highly orientated and non-orientated microcrystalline diamond films and MPCVD-produced amorphous carbon have also been studied by way of comparison. The diamond films exhibit a linear relationship between roughness and the coefficient of friction. The DLC and amorphous carbon have higher friction coefficients than the best performing diamond film, but may more easily be deposited as smooth coating. Possible applications for these various carbon-based films include microelectromechanical components, for which smooth, hard coatings are required.

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