Ion-beam deposition of Zr-Al multilayers and their structural properties

Superlattice structure of SrTiO3and Nb-doped SrTiO3have been epitaxially grown on atomically flat surface of LaAlO3substrates by ion beam deposition method. Epitaxial superlattices were grown at 800 °C in the presence of partial oxygen pressure under optimizing growth conditions. The Nb-doped SrTiO3layers were varied from 2 to 15 unit cell thickness approximately, while SrTiO3layers are maintained at 15 unit cell thickness with 10 periods. The superlattices with various Nb-doped SrTiO3layer thicknesses were investigated using X-ray diffractometer (XRD) and atomic force microscope (AFM), in order to clearly understand structural properties and surface structure, which are significant for fabrication of the high quality superlattice structure.

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Ion-beam deposition of Zr−Al multilayers and their structural properties

Surface and Coatings Technology ◽

10.1016/s0257-8972(09)90072-x ◽

1992 ◽

Vol 54-55 ◽

pp. 335-337 ◽

Cited By ~ 1

Author(s):

S.B. Qadri ◽

C. Kim ◽

M. Twigg ◽

D. Moon

Keyword(s):

Structural Properties ◽

Ion Beam ◽

Ion Beam Deposition ◽

Beam Deposition

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Ion-beam deposition of Zr–Al multilayers and their structural properties

Metallurgical Coatings and Thin Films 1992 ◽

10.1016/b978-0-444-89900-2.50060-9 ◽

1992 ◽

pp. 335-337

Author(s):

S.B. Qadri ◽

C. Kim ◽

M. Twigg ◽

D. Moon

Keyword(s):

Structural Properties ◽

Ion Beam ◽

Ion Beam Deposition ◽

Beam Deposition

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Structural properties and surface wettability of Cu-containing diamond-like carbon films prepared by a hybrid linear ion beam deposition technique

Thin Solid Films ◽

10.1016/j.tsf.2015.01.018 ◽

2015 ◽

Vol 584 ◽

pp. 289-293 ◽

Cited By ~ 18

Author(s):

Peng Guo ◽

Lili Sun ◽

Xiaowei Li ◽

Sheng Xu ◽

Peiling Ke ◽

...

Keyword(s):

Structural Properties ◽

Ion Beam ◽

Carbon Films ◽

Surface Wettability ◽

Diamond Like Carbon ◽

Deposition Technique ◽

Ion Beam Deposition ◽

Beam Deposition

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Effect of ion beam energy on the electrical, optical, and structural properties of indium tin oxide thin films prepared by direct metal ion beam deposition technique

Thin Solid Films ◽

10.1016/s0040-6090(02)00148-7 ◽

2002 ◽

Vol 408 (1-2) ◽

pp. 218-222 ◽

Cited By ~ 20

Author(s):

Daeil Kim ◽

Steven Kim

Keyword(s):

Thin Films ◽

Structural Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Metal Ion ◽

Beam Energy ◽

Ion Beam ◽

Deposition Technique ◽

Ion Beam Deposition ◽

Beam Deposition

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Electron energy loss spectroscopy of diamond-like carbon thin films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100130997 ◽

1992 ◽

Vol 50 (2) ◽

pp. 1272-1273

Author(s):

J. Kulik ◽

Y. Lifshitz ◽

G.D. Lempert ◽

S. Rotter ◽

J.W. Rabalais ◽

...

Keyword(s):

Thin Films ◽

Energy Loss ◽

Electron Energy ◽

Ion Beam ◽

Diamond Like Carbon ◽

Ion Beam Deposition ◽

Chemistry Research ◽

Carbon Thin Films ◽

Electron Energy Loss ◽

Beam Deposition

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

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