Ion bombardment of AlN films deposited in a reactive sputtering process with accurate control of the mass flow of the reactive gas

1992 ◽  
Vol 51 (1-3) ◽  
pp. 500-508 ◽  
Author(s):  
K. Alkjærsig ◽  
H.B. Christensen ◽  
B.K. Gupta ◽  
H. Jensen ◽  
U.M. Jensen ◽  
...  
Keyword(s):  
Mass Flow ◽  
Ion Bombardment ◽  
Reactive Sputtering ◽  
Reactive Gas

Effect of reactive gas mass flow on the composition and structure of AIN films deposited by reactive sputtering

1993 ◽  
Vol 230 (2) ◽  
pp. 121-127 ◽  
Author(s):  
E.J.-Bienk ◽  
H. Jensen ◽  
G.N. Pedersen ◽  
G. Sørensen
Keyword(s):  
Mass Flow ◽  
Reactive Sputtering ◽  
Composition And Structure ◽  
Reactive Gas

scholarly journals The nitrogen concentration effect on Ce doped SiOxNy emission: towards optimized Ce3+ for LED applications

Nanoscale ◽  
2018 ◽  
Vol 10 (8) ◽  
pp. 3823-3837 ◽  
Author(s):  
F. Ehré ◽  
C. Labbé ◽  
C. Dufour ◽  
W. M. Jadwisienczak ◽  
J. Weimmerskirch-Aubatin ◽  
...  
Keyword(s):  
Nitrogen Concentration ◽  
Reactive Sputtering ◽  
Concentration Effect ◽  
Gas Atmosphere ◽  
Reactive Gas

Ce-Doped SiOxNy films are deposited by magnetron reactive sputtering from a CeO2 target under a nitrogen reactive gas atmosphere.

Reactive sputtering of TiOxNy coatings by the reactive gas pulsing process

2007 ◽  
Vol 201 (18) ◽  
pp. 7727-7732 ◽  
Author(s):  
N. Martin ◽  
J. Lintymer ◽  
J. Gavoille ◽  
J.M. Chappé ◽  
F. Sthal ◽  
...  
Keyword(s):  
Reactive Sputtering ◽  
Reactive Gas

Role of ion bombardment in forming CNx and CNxHy films deposited by r.f.-magnetron reactive sputtering and ECR plasma-activated CVD methods

1999 ◽  
Vol 113 (1-2) ◽  
pp. 134-139 ◽  
Author(s):  
L.R. Shaginyan ◽  
A.A. Onoprienko ◽  
V.M. Vereschaka ◽  
F. Fendrych ◽  
V.G. Vysotsky
Keyword(s):  
Ion Bombardment ◽  
Reactive Sputtering ◽  
Ecr Plasma

Mass flow limitations in reactive sputtering

1985 ◽  
Vol 130 (3-4) ◽  
pp. 307-313 ◽  
Author(s):  
H.-O. Blom ◽  
S. Berg ◽  
T. Larsson
Keyword(s):  
Mass Flow ◽  
Reactive Sputtering

Effects of ion bombardment with reactive gas environment on adhesion of Au films to Parylene C film

2005 ◽  
Vol 476 (2) ◽  
pp. 386-390 ◽  
Author(s):  
J.W. Seong ◽  
K.W. Kim ◽  
Y.W. Beag ◽  
S.K. Koh ◽  
K.H. Yoon ◽  
...  
Keyword(s):  
Ion Bombardment ◽  
Parylene C ◽  
Gas Environment ◽  
Reactive Gas

Ion Bombardment Effects on Boron Nitride Film Synthesis by Reactive Sputtering with Electron Cyclotron Resonance Plasmas

1999 ◽  
Vol 38 (Part 1, No. 7B) ◽  
pp. 4515-4519 ◽  
Author(s):  
Masayuki Wakatsuchi ◽  
Yoshiro Takaba ◽  
Kumiko \scshapeKanai ◽  
Yoshio Ueda ◽  
Masahiro Nishikawa
Keyword(s):  
Boron Nitride ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Bombardment ◽  
Reactive Sputtering ◽  
Electron Cyclotron ◽  
Nitride Film ◽  
Film Synthesis
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