TiN film formation by plasma chemical vapor deposition and its plasma diagnostics
1991 ◽
pp. 279-283
1991 ◽
Vol 49
(1-3)
◽
pp. 279-283
◽
1997 ◽
Vol 15
(6)
◽
pp. 3170-3170
1997 ◽
Vol 15
(4)
◽
pp. 1897-1901
◽
1991 ◽
Vol 30
(Part 1, No. 4)
◽
pp. 790-795
◽
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-691-Pr3-702
1989 ◽
Vol 50
(C5)
◽
pp. C5-667-C5-672
2009 ◽
Vol 23
(09)
◽
pp. 2159-2165
◽
2015 ◽
Vol 18
(1)
◽