Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides

2005 ◽  
Vol 246 (1-3) ◽  
pp. 250-261 ◽  
Author(s):  
Trinh T. Van ◽  
Jane P. Chang
Keyword(s):  
Atomic Layer Deposition ◽  
Metal Oxides ◽  
Reaction Kinetics ◽  
Surface Reaction ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Surface Reaction Kinetics ◽  
Kinetics Of

Interface Studies of Metal Oxides Grown Directly on Hybrid Perovskite by Atomic Layer Deposition

2019 ◽  
Author(s):  
Claire Burgess ◽  
Farzad Mardekatani Asl ◽  
Valerio Zardetto ◽  
Herbert Lifka ◽  
Sjoerd Veenstra ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Metal Oxides ◽  
Atomic Layer ◽  
Hybrid Perovskite ◽  
Layer Deposition

Chemical resistance of thin film materials based on metal oxides grown by atomic layer deposition

2013 ◽  
Vol 542 ◽  
pp. 219-224 ◽  
Author(s):  
Väino Sammelselg ◽  
Ivan Netšipailo ◽  
Aleks Aidla ◽  
Aivar Tarre ◽  
Lauri Aarik ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Metal Oxides ◽  
Chemical Resistance ◽  
Atomic Layer ◽  
Layer Deposition

Surface reaction kinetics of Ga1−xInxP growth during pulsed chemical beam epitaxy

2001 ◽  
Vol 178 (1-4) ◽  
pp. 63-74
Author(s):  
N. Dietz ◽  
S.C. Beeler ◽  
J.W. Schmidt ◽  
H.T. Tran
Keyword(s):  
Reaction Kinetics ◽  
Surface Reaction ◽  
Chemical Beam Epitaxy ◽  
Surface Reaction Kinetics ◽  
Kinetics Of

Non-linear Surface Reaction Kinetics of GaAs MOVPE Explored by Selective Area Growth

2019 ◽  
Vol 2 (7) ◽  
pp. 145-156
Author(s):  
Haizheng Song ◽  
M. Sugiyama ◽  
Yoshiaki Nakano ◽  
Yukihiro Shimogaki
Keyword(s):  
Reaction Kinetics ◽  
Surface Reaction ◽  
Selective Area Growth ◽  
Selective Area ◽  
Area Growth ◽  
Non Linear ◽  
Surface Reaction Kinetics ◽  
Kinetics Of
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