Surface Reaction Kinetics of Titanium Isopropoxide and Water in Atomic Layer Deposition

2016 ◽  
Vol 120 (8) ◽  
pp. 4337-4344 ◽  
Author(s):  
Michael Reinke ◽  
Yury Kuzminykh ◽  
Patrik Hoffmann
Keyword(s):  
Atomic Layer Deposition ◽  
Reaction Kinetics ◽  
Surface Reaction ◽  
Atomic Layer ◽  
Titanium Isopropoxide ◽  
Layer Deposition ◽  
Surface Reaction Kinetics ◽  
Kinetics Of

Surface reaction kinetics of Ga1−xInxP growth during pulsed chemical beam epitaxy

2001 ◽  
Vol 178 (1-4) ◽  
pp. 63-74
Author(s):  
N. Dietz ◽  
S.C. Beeler ◽  
J.W. Schmidt ◽  
H.T. Tran
Keyword(s):  
Reaction Kinetics ◽  
Surface Reaction ◽  
Chemical Beam Epitaxy ◽  
Surface Reaction Kinetics ◽  
Kinetics Of

Non-linear Surface Reaction Kinetics of GaAs MOVPE Explored by Selective Area Growth

2019 ◽  
Vol 2 (7) ◽  
pp. 145-156
Author(s):  
Haizheng Song ◽  
M. Sugiyama ◽  
Yoshiaki Nakano ◽  
Yukihiro Shimogaki
Keyword(s):  
Reaction Kinetics ◽  
Surface Reaction ◽  
Selective Area Growth ◽  
Selective Area ◽  
Area Growth ◽  
Non Linear ◽  
Surface Reaction Kinetics ◽  
Kinetics Of
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