Microstructure and tribological properties of TiN, TiC and Ti(C, N) thin films prepared by closed-field unbalanced magnetron sputtering ion plating

Applied Surface Science ◽

10.1016/j.apsusc.2009.06.090 ◽

2009 ◽

Vol 255 (21) ◽

pp. 8788-8793 ◽

Author(s):

Guojun Zhang ◽

Bin Li ◽

Bailing Jiang ◽

Fuxue Yan ◽

Dichun Chen

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Ion Plating ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Substrate Bias Effects on Mechanical and Tribological Properties of Nanoscale Multilayer CrTiAlN Coatings Prepared by Closed Field Unbalanced Magnetron Sputtering Ion Plating Method

Advances in Composite Materials and Structures - Key Engineering Materials ◽

10.4028/0-87849-427-8.885 ◽

2007 ◽

pp. 885-888

Author(s):

P.L. Tam ◽

P.W. Shum ◽

Z.F. Zhou ◽

K.Y. Li

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Substrate Bias ◽

Ion Plating ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

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Substrate Bias Effects on Mechanical and Tribological Properties of Nanoscale Multilayer CrTiAlN Coatings Prepared by Closed Field Unbalanced Magnetron Sputtering Ion Plating Method

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.334-335.885 ◽

2007 ◽

Vol 334-335 ◽

pp. 885-888 ◽

Author(s):

P.L. Tam ◽

P.W. Shum ◽

Zhi Feng Zhou ◽

K.Y. Li

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Substrate Bias ◽

Ion Plating ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

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Structural and tribological properties of CrTiAlN coatings on Mg alloy by closed-field unbalanced magnetron sputtering ion plating

Applied Surface Science ◽

10.1016/j.apsusc.2008.05.338 ◽

2008 ◽

Vol 254 (22) ◽

pp. 7342-7350 ◽

Author(s):

Yongjing Shi ◽

Siyuan Long ◽

Shicai Yang ◽

Fusheng Pan

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Mg Alloy ◽

Closed Field ◽

Ion Plating ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Closed Field Unbalanced Magnetron Sputtering Ion Plating of Ni/Al Thin Films: Influence of the Magnetron Power

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2010.1455 ◽

2010 ◽

Vol 10 (4) ◽

pp. 2558-2563

Author(s):

R. Said ◽

W. Ahmed ◽

J. Gracio

Keyword(s):

Magnetron Sputtering ◽

Closed Field ◽

Ion Plating ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Microstructure, mechanical and tribological properties of Cr–C–N coatings deposited by pulsed closed field unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2009.04.032 ◽

2009 ◽

Vol 204 (6-7) ◽

pp. 931-935 ◽

Author(s):

Z.L. Wu ◽

J. Lin ◽

J.J. Moore ◽

M.K. Lei

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating

Journal of Material Science and Technology ◽

10.1016/s1005-0302(10)60019-9 ◽

2010 ◽

Vol 26 (2) ◽

pp. 119-124 ◽

Author(s):

Guojun Zhang ◽

Bin Li ◽

Bailing Jiang ◽

Dichun Chen ◽

Fuxue Yan

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Closed Field ◽

Ion Plating ◽

Unbalanced Magnetron Sputtering ◽

Microstructure And Mechanical Properties ◽

Unbalanced Magnetron

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Thermal stability and tribological properties of CrZr–Si–N films synthesized by closed field unbalanced magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3116589 ◽

2009 ◽

Vol 27 (4) ◽

pp. 867-872 ◽

Author(s):

Sang Yul Lee ◽

Young Su Kim ◽

Gwang Seok Kim

Keyword(s):

Thermal Stability ◽

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Structure and mechanical properties of ZrCrAlN nanostructured thin films by closed-field unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.07.115 ◽

2007 ◽

Vol 201 (9-11) ◽

pp. 5547-5551 ◽

Author(s):

Youn J. Kim ◽

Ho Y. Lee ◽

Yong M. Kim ◽

Kyung S. Shin ◽

Woo S. Jung ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Closed Field ◽

Nanostructured Thin Films ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Deposition and Adhesion Characterization of Ti(BN:MoS2) Based Composite Thin Films Prepared by Closed-Field Unbalanced Magnetron Sputtering

Journal of Adhesion Science and Technology ◽

10.1163/016942410x549933 ◽

2011 ◽

Vol 25 (13) ◽

pp. 1497-1505 ◽

Author(s):

Ali Fatih Yetim ◽

Ihsan Efeoglu ◽

Ayhan Celik ◽

Akgün Alsaran ◽

Irfan Kaymaz

Keyword(s):

Magnetron Sputtering ◽

Closed Field ◽

Composite Thin Films ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Microstructural and Mechanical Properties of CrTiAlN Nanocomposite Thin Films Synthesized by Closed Field Unbalanced Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.51.1183 ◽

2007 ◽

Vol 51 (3) ◽

pp. 1183

Author(s):

Youn J. Kim ◽

Ho Y. Lee ◽

Sung I. Kim ◽

Jeon G. Han ◽

Kab S. Kim

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Closed Field ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Nanocomposite Thin Films

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