Thermal stability and tribological properties of CrZr–Si–N films synthesized by closed field unbalanced magnetron sputtering

2009 ◽  
Vol 27 (4) ◽  
pp. 867-872 ◽  
Author(s):  
Sang Yul Lee ◽  
Young Su Kim ◽  
Gwang Seok Kim
Keyword(s):  
Thermal Stability ◽  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Closed Field ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Influence of CrB2 target current on the microstructure, mechanical and tribological properties of Cr–B–C–N coatings in water

RSC Advances ◽  
2016 ◽  
Vol 6 (53) ◽  
pp. 47698-47711 ◽  
Author(s):  
Qiang Ma ◽  
Fei Zhou ◽  
Qianzhi Wang ◽  
Zhiwei Wu ◽  
Kangmin Chen ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Stainless Steels ◽  
Closed Field ◽  
Mechanical And Tribological Properties ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Cr–B–C–N coatings with different boron contents (24.6–27.2 at%) were deposited on Si(100) wafers and 316L stainless steels by using closed-field unbalanced magnetron sputtering via adjusting the CrB2 target current.

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