Multipulse irradiation of silicon by femtosecond laser pulses: Variation of surface morphology

2012 ◽  
Vol 258 (8) ◽  
pp. 3589-3597 ◽  
Author(s):  
S. Lugomer ◽  
A. Maksimović ◽  
B. Farkas ◽  
Z. Geretovszky ◽  
T. Szörényi ◽  
...  
2012 ◽  
Vol 30 (3) ◽  
pp. 473-479 ◽  
Author(s):  
Mohamed E. Shaheen ◽  
Brian J. Fryer

AbstractThe interaction of near infrared femtosecond laser pulses with a Cu based alloy (brass) in ambient air at atmospheric pressure and under different laser conditions was investigated. The effects of laser fluence and number of pulses on surface morphology and ablation rate were studied using scanning electron microscopy (SEM) and optical microscopy. Ablation rates were found to rapidly increase from 83 to 604 nm/pulse in the fluence range 1.14–12.21 J/cm2. At fluence >12.21 J/cm2, ablation rates increased slowly to a maximum (607 nm/pulse at 19.14 J/cm2), and then decreased at fluence higher than 20.47 J/cm2 to 564 nm/pulse at 24.89 J/cm2. Large amounts of ablated material in a form of agglomerated fine particles were observed around the ablation craters as the number of laser pulses and fluence increased. The study of surface morphology shows reduced thermal effects with femtosecond laser ablation in comparison to nanosecond laser ablation at low fluence.


2021 ◽  
Vol 11 (5) ◽  
pp. 2250
Author(s):  
Yanping Yuan ◽  
Xinyang Guo ◽  
Yitong Shang ◽  
Jimin Chen

An effective approach is proposed to adjust the surface morphology induced by using a femtosecond laser, including the area and period of rippled structures. The effect of the processing steps and laser polarization on the surface morphology of rippled structures on a titanium surface was experimentally investigated in this study. A processing sequence was designed for two series of femtosecond laser pulses that irradiate a titanium surface, for example, N = 50(0°) + 50(90°). The experimental results show that the area and period of rippled structures can be simultaneously adjusted by following a two-step method. Due to the enhancement of energy absorption and SP-laser coupling of the initial rippled structures, large area surface structures with small periods are fabricated using two series of femtosecond laser pulses with the same polarization direction. By changing the polarization direction of the two series of femtosecond laser pulses, the recording, erasing, and rewriting of subwavelength ripples is achieved. During the rewriting process, material removal and the formation of new ripples simultaneously occur.


2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.


Author(s):  
K. H. Leong ◽  
T. Y. Plew ◽  
R. L. Maynard ◽  
A. A. Said ◽  
L. A. Walker

Author(s):  
V. Pouget ◽  
E. Faraud ◽  
K. Shao ◽  
S. Jonathas ◽  
D. Horain ◽  
...  

Abstract This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.


2016 ◽  
Vol 80 (1) ◽  
pp. 85-88 ◽  
Author(s):  
V. P. Dresvyanskiy ◽  
M. A. Moiseeva ◽  
A. V. Kuznetsov ◽  
D. S. Glazunov ◽  
B. Chadraa ◽  
...  

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