Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering

2013 ◽  
Vol 284 ◽  
pp. 165-170 ◽  
Author(s):  
Yanxia Wu ◽  
Jianmin Chen ◽  
Hongxuan Li ◽  
Li Ji ◽  
Yinping Ye ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Nanocomposite Films ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Superhard Nanocomposite of Nitride Superlattices by Opposed-Cathode Unbalanced Magnetron Sputtering

1992 ◽  
Vol 286 ◽  
Author(s):  
X. Chu ◽  
M. S. Wong ◽  
W. D. Sproul ◽  
S. A. Barnett
Keyword(s):  
Magnetron Sputtering ◽  
Film Growth ◽  
Thin Layers ◽  
High Rate ◽  
Nanocomposite Films ◽  
Individual Layer ◽  
Substrate Bias Voltage ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Nitride Superlattices

ABSTRACTNanocomposite films of polycrystalline nitride superlattices with nanometer grain size were deposited onto tool steel substrates by a one-step process using an opposed-cathode high-rate reactive unbalanced magnetron sputtering system. The superlattices are composed of alternating thin layers of different nitrides such as TiN/NbN and TiN/VN. The thicknesses of two neighboring layers were between 3 and 150 nm and were determined by the rotating speed of the substrate holder and the sputtering rate of the individual layer material. The films exhibited exceptional hardness as high as 5200 kgf/mm2 for TiN/NbN superlattice and 5 100 kgf/mm2 for TiN/VN superlattice. The hardnesses of the superlattice coatings were strongly dependent on several deposition parameters such as the superlattice period, the nitrogen partial pressure, and the substrate bias voltage. One of the possible mechanisms for the hardness enhancement is the effect of nanophase materials, which were created mainly by the influence of the artificially layered-structure and the low energy ion bombardment during film growth.

Deposition Behavior of Boron Carbide Thin Film Deposited by Unbalanced Magnetron Sputtering Method

2014 ◽  
Vol 52 (12) ◽  
pp. 969-974
Author(s):  
Young Joon Baik ◽  
Kyung Eun Bae ◽  
Jong Keuk Park ◽  
Wook Seong Lee
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Boron Carbide ◽  
Deposition Behavior ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

2000 ◽  
Vol 130 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Da-Yung Wang ◽  
Chi-Lung Chang ◽  
Cheng-Hsun Hsu ◽  
Hua-Ni Lin
Keyword(s):  
Magnetron Sputtering ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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