Optical and electrical properties of Mg-doped zinc tin oxide films prepared by radio frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2013.09.035 ◽

2013 ◽

Vol 286 ◽

pp. 131-136 ◽

Author(s):

Tae Young Ma ◽

Mu Hee Choi

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Tin Oxide ◽

Tin Oxide Films ◽

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Characterization of zinc–tin–oxide films deposited by radio frequency magnetron sputtering at various substrate temperatures

Thin Solid Films ◽

10.1016/j.tsf.2013.08.067 ◽

2013 ◽

Vol 548 ◽

pp. 385-388 ◽

Author(s):

Ik-Jae Lee ◽

Nark-Eon Sung ◽

Keun Hwa Chae ◽

Ray Conley

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Tin Oxide ◽

Substrate Temperatures ◽

Tin Oxide Films

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Structural Characterization of Zinc-Tin-Oxide Films Deposited on Quartz Substrates by Radio Frequency Magnetron Sputtering

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2016.13159 ◽

2016 ◽

Vol 16 (10) ◽

pp. 10356-10360 ◽

Author(s):

Nark-Eon Sung ◽

Keun Hwa Chae ◽

Ik-Jae Lee

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Structural Characterization ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Tin Oxide ◽

Quartz Substrates ◽

Tin Oxide Films

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Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.05.093 ◽

2008 ◽

Vol 516 (8) ◽

pp. 1984-1991 ◽

Author(s):

Chih-hao Yang ◽

Shih-chin Lee ◽

Tien-chai Lin ◽

Suz-cheng Chen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Plastic Substrates ◽

Tin Oxide Films

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Structural, electrical, and optical properties of antimony-doped tin oxide films prepared at room temperature by radio frequency magnetron sputtering for transparent electrodes

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3139891 ◽

2009 ◽

Vol 27 (4) ◽

pp. 996-1000 ◽

Author(s):

Sung Uk Lee ◽

Byungyou Hong ◽

Won Seok Choi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Room Temperature ◽

Oxide Films ◽

Transparent Electrodes ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Structural and electrical properties of fluorine-doped zinc tin oxide thin films prepared by radio-frequency magnetron sputtering

Current Applied Physics ◽

10.1016/j.cap.2014.03.020 ◽

2014 ◽

Vol 14 (6) ◽

pp. 850-855 ◽

Author(s):

R. Pandey ◽

S.H. Cho ◽

D.K. Hwang ◽

W.K. Choi

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Structural And Electrical Properties ◽

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A study for the bias control of indium–tin–oxide films synthesized by cesium assisted radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1584038 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1069-1072 ◽

Author(s):

Deuk Yeon Lee ◽

Se-Jong Lee ◽

Kie Moon Song ◽

Hong Koo Baik

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(96)09311-x ◽

1997 ◽

Vol 298 (1-2) ◽

pp. 221-227 ◽

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Indium tin oxide films deposited on polyethylene naphthalate substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.10.016 ◽

2009 ◽

Vol 517 (8) ◽

pp. 2596-2601 ◽

Author(s):

M.G. Sandoval-Paz ◽

R. Ramírez-Bon

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Polyethylene Naphthalate ◽

Tin Oxide Films

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Optical and electrical properties of radio frequency sputtered tin oxide films doped with oxygen vacancies, F, Sb, or Mo

Journal of Applied Physics ◽

10.1063/1.357383 ◽

1994 ◽

Vol 76 (6) ◽

pp. 3797-3817 ◽

Author(s):

B. Stjerna ◽

E. Olsson ◽

C. G. Granqvist

Keyword(s):

Electrical Properties ◽

Radio Frequency ◽

Tin Oxide ◽

Oxygen Vacancies ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Tin Oxide Films

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Influence of energetic bombardment on stress, resistivity, and microstructure of indium tin oxide films grown by radio frequency magnetron sputtering on flexible polyester substrates

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1566789 ◽

2003 ◽

Vol 21 (3) ◽

pp. 745-751 ◽

Author(s):

P. F. Carcia ◽

R. S. McLean ◽

M. H. Reilly ◽

Z. G. Li ◽

L. J. Pillione ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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