Effect of rf-power density on the resistivity of Ga-doped ZnO film deposited by rf-magnetron sputter deposition technique

2010 ◽  
Vol 10 (3) ◽  
pp. S451-S454 ◽  
Author(s):  
Jun Kwan Kim ◽  
Sun Jin Yun ◽  
Jae Min Lee ◽  
Jung Wook Lim
Keyword(s):  
Power Density ◽  
Sputter Deposition ◽  
Rf Power ◽  
Deposition Technique ◽  
Zno Film ◽  
Magnetron Sputter Deposition ◽  
Doped Zno ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter

Fabrication of p-Type ZnO Thin Films Using rf-Magnetron Sputter Deposition

2009 ◽  
Vol 12 (4) ◽  
pp. H109 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jung Wook Lim ◽  
Hyun Tak Kim ◽  
Sang Hoon Kim ◽  
Sun Jin Yun
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Zno Thin Films ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter ◽  
P Type
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