scholarly journals Dynamic parameter estimation of atomic layer deposition kinetics applied to in situ quartz crystal microbalance diagnostics

2014 ◽  
Vol 111 ◽  
pp. 15-33 ◽  
Author(s):  
A. Holmqvist ◽  
T. Törndahl ◽  
F. Magnusson ◽  
U. Zimmermann ◽  
S. Stenström
Keyword(s):  
Parameter Estimation ◽  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Dynamic Parameter ◽  
Deposition Kinetics ◽  
Layer Deposition ◽  
Dynamic Parameter Estimation

scholarly journals Atomic Layer Deposition of Ternary Compounds on Cu(In,Ga)Se2: An In Situ Quartz Crystal Microbalance Study

2020 ◽  
Vol 3 (7) ◽  
pp. 7208-7215
Author(s):  
Fredrik Larsson ◽  
Lars Stolt ◽  
Adam Hultqvist ◽  
Marika Edoff ◽  
Jan Keller ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Ternary Compounds ◽  
Layer Deposition

Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6

2005 ◽  
Vol 488 (1-2) ◽  
pp. 103-110 ◽  
Author(s):  
F.H. Fabreguette ◽  
Z.A. Sechrist ◽  
J.W. Elam ◽  
S.M. George
Keyword(s):  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Layer Deposition
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