Comparison of precursor infiltration into polymer thin films via atomic layer deposition and sequential vapor infiltration using in-situ quartz crystal microgravimetry

2014 ◽  
Vol 32 (4) ◽  
pp. 041602 ◽  
Author(s):  
Richard P. Padbury ◽  
Jesse S. Jur
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Quartz Crystal ◽  
Polymer Thin Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Quartz Crystal Microgravimetry ◽  
Vapor Infiltration

scholarly journals Atomic Layer Deposition of Ternary Compounds on Cu(In,Ga)Se2: An In Situ Quartz Crystal Microbalance Study

2020 ◽  
Vol 3 (7) ◽  
pp. 7208-7215
Author(s):  
Fredrik Larsson ◽  
Lars Stolt ◽  
Adam Hultqvist ◽  
Marika Edoff ◽  
Jan Keller ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Ternary Compounds ◽  
Layer Deposition

Interface Electrical Properties of Al2O3 Thin Films on Graphene Obtained by Atomic Layer Deposition with an in Situ Seedlike Layer

2017 ◽  
Vol 9 (8) ◽  
pp. 7761-7771 ◽  
Author(s):  
Gabriele Fisichella ◽  
Emanuela Schilirò ◽  
Salvatore Di Franco ◽  
Patrick Fiorenza ◽  
Raffaella Lo Nigro ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

In situ crystallization study of impurity phases in Bi–Fe–O thin films grown by atomic layer deposition

CrystEngComm ◽  
2017 ◽  
Vol 19 (1) ◽  
pp. 166-170 ◽  
Author(s):  
Andrew R. Akbashev ◽  
Matthias Falmbigl ◽  
Aleksandr V. Plokhikh ◽  
Jonathan E. Spanier
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Impurity Phases ◽  
Layer Deposition ◽  
In Situ Crystallization ◽  
Crystallization Study
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