A fuzzy deep predictive analytics approach for enhancing cycle time range estimation precision in wafer fabrication
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2009 ◽
Vol 223
(8)
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pp. 1033-1043
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2011 ◽
Vol 56
(9-12)
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pp. 1007-1018
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2011 ◽
Vol 7
(4)
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pp. 47-64
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2020 ◽
Vol 83
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pp. 106577
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2013 ◽
Vol 2013
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pp. 1-15
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2011 ◽
Vol 62
(1-4)
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pp. 317-328
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2015 ◽
Vol 7
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pp. 789-800
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2009 ◽
Vol 223
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pp. 1021-1031
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2014 ◽
Vol 38
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pp. 289-304
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