Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steel

2011 ◽  
Vol 56 (28) ◽  
pp. 10516-10523 ◽  
Author(s):  
Belén Díaz ◽  
Jolanta Światowska ◽  
Vincent Maurice ◽  
Antoine Seyeux ◽  
Bernard Normand ◽  
...  
2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus

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