Precision positioning is an essential basis for precision mechanical engineering, such as
positioning for precision manufacture, or positioning control of robot arms. Due to the increasing
demand for precision in the submicrometer range, precision positioning plays an important role for
precision manufacture.
In this investigation a nano-positioning stage is developed. With the positioning system, high
precision positioning and large displacement range can be achieved simultaneously. Advantages of
this developed system are positioning driver with single actuator, uncomplicated mechanical
structure, low cost and lower hardware requirement.
A laser interferometer is used for displacement measurements of the translation stage, and a
mini-autocollimator serves as angle sensor for tilt angle measurements. The tilt angle can be
minimized with piezo translators and control operations. By the displacement measurements of
laser interferometer, the feedback control is performed for positioning in large travel range.
High precision positioning in nanometer-order can be achieved with the positioning system.
With this development, individual sensor modules are self-accomplished and dominating
technologies for the complete nano-positioning system are established.