Barrier layer and annealing temperature dependent microstructure evolution of nanocrystalline Cu films

2009 ◽  
Vol 117 (1) ◽  
pp. 321-325 ◽  
Author(s):  
Z.H. Cao ◽  
H.M. Lu ◽  
X.K. Meng
2002 ◽  
Vol 16 (01n02) ◽  
pp. 189-196 ◽  
Author(s):  
C. Y. LI ◽  
D. H. ZHANG ◽  
J. J. WU ◽  
D. X. QI ◽  
Y. QIAN ◽  
...  

We investigated the effect of barrier metals, Ta, TaN and multi-stacked Ta/TaN , on the stress of the late deposited Cu film using ionised-metal plasma (IMP) technique. It was found that the stress of the IMP Cu film is sensitive to the strain or lattice mismatch of the barrier layer underneath. The nitrogen composition incorporated into Ta barrier layer causes tensile strain in the barrier and also the stress in the late deposited Cu film. The Cu film deposited on a multi-stacked Ta/TaN barrier showed the smallest stress due to relaxation of strain in the multi-layer barrier. In addition, the stress was also found sensitive to the annealing temperature. The abrupt change in the stress at high annealing temperatures coincides well with the formation of Cu 3 Si compound.


2021 ◽  
Vol 1035 ◽  
pp. 404-409
Author(s):  
Zhe Rui Zhang ◽  
Ren Bo Song ◽  
Nai Peng Zhou ◽  
Wei Feng Huo

In this study, a new Fe-6Mn-4Al-0.4C high strength medium manganese hot rolled steel sheet was designed. The influence mechanism of the intercritical annealing (IA) temperature on microstructure evolution and mechanical properties of experimental steel were studied by SEM and XRD. The experimental steel was held for 30 minutes at 640°C, 680°C, 720°C, 760°C, 800°C, respectively. When the annealing temperature was 640°C, cementite particles precipitated between the austenite and ferrite phase boundary. As the annealing temperature increased, the cementite gradually dissolved and disappeared, the fraction of lamellar austenite increased significantly. When the annealing temperature is 800°C, the coarse equiaxed austenite and ferrite appeared. The yield strength (YS) decreased, the product of strength and elongation (PSE) and total elongation (TE) both increased first and then decreased, while the ultimate tensile strength (UTS) showed the opposite trend. The experimental steel exhibited excellent comprehensive mechanical properties after held at 760°C for 30 min. The UTS was 870 MPa, the YS was 703 MPa, and the TE was 77 %, the PSE was 67 GPa·%.


2013 ◽  
Vol 63 (12) ◽  
pp. 1328-1332
Author(s):  
D. Y. Lee ◽  
C. -W. Cho ◽  
S. H. Lee ◽  
J. W. Kim ◽  
H. K. Kim ◽  
...  

1993 ◽  
Vol 74 (6) ◽  
pp. 3890-3898 ◽  
Author(s):  
Ming‐Kaan Liang ◽  
Yong‐Chien Ling

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