An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices

2007 ◽  
Vol 84 (11) ◽  
pp. 2582-2586 ◽  
Author(s):  
E. Hong ◽  
S. Demuynck ◽  
Q.T. Le ◽  
M. Baklanov ◽  
L. Carbonell ◽  
...  
Keyword(s):  
Thermal Stability ◽  
High Thermal Stability ◽  
Memory Devices ◽  
Low K

Via-Profile Controlled, Porous Low-k/ Cu DDIs with High Thermal Stability

2005 ◽  
Author(s):  
H. Ohtake ◽  
S. Saito ◽  
M. Tagami ◽  
M. Tada ◽  
M. Abe ◽  
...  
Keyword(s):  
Thermal Stability ◽  
High Thermal Stability ◽  
Low K

High thermal stability and fast operation speed phase-change memory devices containing Hf-doped Ge2Sb2Te5 films

2020 ◽  
Vol 278 ◽  
pp. 128402
Author(s):  
Ruobing Wang ◽  
Jiabin Shen ◽  
Xin Chen ◽  
Hao Wang ◽  
Sannian Song ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Phase Change ◽  
Phase Change Memory ◽  
High Thermal Stability ◽  
Memory Devices ◽  
Operation Speed ◽  
Change Memory

Electrical and adhesion properties of plasma-polymerised ultra-low k dielectric films with high thermal stability

2000 ◽  
Vol 50 (1-4) ◽  
pp. 7-14 ◽  
Author(s):  
M Uhlig ◽  
A Bertz ◽  
M Rennau ◽  
S.E Schulz ◽  
T Werner ◽  
...  
Keyword(s):  
Thermal Stability ◽  
High Thermal Stability ◽  
Dielectric Films ◽  
Adhesion Properties ◽  
Low K

All-carbocycle hydrocarbon thermosets with high thermal stability and robust mechanical strength for low-k interlayer dielectrics

2021 ◽  
Author(s):  
Yudi Feng ◽  
Ke Jin ◽  
Jia Guo ◽  
Changchun Wang
Keyword(s):  
Thermal Stability ◽  
Mechanical Strength ◽  
Dielectric Materials ◽  
High Thermal Stability ◽  
Thermal Stabilities ◽  
Interlayer Dielectric ◽  
Interlayer Dielectrics ◽  
Low Permittivity ◽  
Low K

The development of modern microelectronic industry calls for low permittivity interlayer dielectric materials with excellent thermal stabilities, robust mechanical strength and matching processability. Traditionally, it is difficult to fabricate materials...

Wide-bandgap bipolar material with high thermal stability

2019 ◽  
pp. 903
Author(s):  
Sheng-Chieh Lin ◽  
Yu-Chieh Cheng ◽  
Man-Kit Leung ◽  
Jiun-Haw Lee ◽  
Tien-Lung Chiu
Keyword(s):  
Thermal Stability ◽  
Wide Bandgap ◽  
High Thermal Stability
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