Via-Profile Controlled, Porous Low-k/ Cu DDIs with High Thermal Stability
2007 ◽
Vol 84
(11)
◽
pp. 2582-2586
◽
2012 ◽
Vol 51
◽
pp. 05EC01
◽
Keyword(s):
2000 ◽
Vol 50
(1-4)
◽
pp. 7-14
◽
Keyword(s):
Keyword(s):
2005 ◽
Vol 148
(2)
◽
pp. 161-168
◽
2011 ◽
Vol 11
(5)
◽
pp. 4639-4643
◽