Nanocomposite Ti–Si–N films deposited by reactive unbalanced magnetron sputtering at room temperature

2004 ◽  
Vol 106 (2) ◽  
pp. 163-171 ◽  
Author(s):  
Ning Jiang ◽  
Y.G Shen ◽  
Y.-W Mai ◽  
Tai Chan ◽  
Simon C Tung
Keyword(s):  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Enhancement in green luminescence of ZnO nanorods grown by dc-unbalanced magnetron sputtering at room temperature

2020 ◽  
Vol 108 ◽  
pp. 110418
Author(s):  
Muhammad Abiyyu Kenichi Purbayanto ◽  
Eka Nurfani ◽  
Muhammad Avicenna Naradipa ◽  
Rena Widita ◽  
Andrivo Rusydi ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Room Temperature ◽  
Zno Nanorods ◽  
Green Luminescence ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

2000 ◽  
Vol 130 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Da-Yung Wang ◽  
Chi-Lung Chang ◽  
Cheng-Hsun Hsu ◽  
Hua-Ni Lin
Keyword(s):  
Magnetron Sputtering ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
Sign in / Sign up

Export Citation Format

Share Document