Effect of annealing on the photoluminescence characteristics of ZnO thin films grown on the sapphire substrate by atomic layer epitaxy

2004 ◽  
Vol 107 (3) ◽  
pp. 301-304 ◽  
Author(s):  
Jongmin Lim ◽  
Kyoungchul Shin ◽  
Hyoun Woo Kim ◽  
Chongmu Lee
Keyword(s):  
Thin Films ◽  
Sapphire Substrate ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Zno Thin Films

Growth of nitrogen-doped p-type ZnO thin films prepared by atomic layer epitaxy

Rare Metals ◽  
2006 ◽  
Vol 25 (6) ◽  
pp. 110-114 ◽  
Author(s):  
C LEE ◽  
J LIM ◽  
S PARK ◽  
H KIM
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Zno Thin Films ◽  
Nitrogen Doped ◽  
P Type

Atomic layer epitaxy of ZnO and TiO 2 thin films on c-plane sapphire substrate for novel oxide soft x-ray mirrors

2010 ◽  
Author(s):  
Masaki Murata ◽  
Yuji Tanaka ◽  
Hiroshi Kumagai ◽  
Tsutomu Shinagawa ◽  
Ataru Kobayashi
Keyword(s):  
Thin Films ◽  
Sapphire Substrate ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
X Ray

Growth of p-type ZnO thin films by using an atomic layer epitaxy technique and NH3 as a doping source

2007 ◽  
Vol 61 (11-12) ◽  
pp. 2495-2498 ◽  
Author(s):  
Chongmu Lee ◽  
Su Young Park ◽  
Jongmin Lim ◽  
Hyoun Woo Kim
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Zno Thin Films ◽  
P Type

scholarly journals Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures

2021 ◽  
Vol 27 (S1) ◽  
pp. 2660-2662
Author(s):  
David Elam ◽  
Eduardo Ortega ◽  
Andrey Chabanov ◽  
Arturo Ponce
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Structural Defects ◽  
Zno Thin Films ◽  
Layer Deposition
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