Selective wet etching and hydrolysis of polycrystalline AlN films grown by metal organic chemical vapor deposition
2022 ◽
Vol 137
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pp. 106157
2000 ◽
Vol 7
(1)
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pp. 12
2021 ◽
Vol 15
(6)
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pp. 2170024
2004 ◽
Vol 110
(1)
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pp. 34-37
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2010 ◽
Vol 49
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pp. 04DL19
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2011 ◽
Vol 58
(5)
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pp. 1447-1451
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