Study on the relationship between the damage of machined surface layer and the dispersion curve of laser-induced surface acoustic wave

2022 ◽  
Vol 148 ◽  
pp. 107667
Author(s):  
Xiaohu Liang ◽  
Bin Lin ◽  
Zaiwei Liu ◽  
Anyao Du
Keyword(s):  
Surface Layer ◽  
Acoustic Wave ◽  
Dispersion Curve ◽  
Surface Acoustic Wave ◽  
Machined Surface ◽  
The Relationship

Friction Layer Analysis of a Surface Acoustic Wave Motor

2020 ◽  
Vol 142 (9) ◽  
Author(s):  
Tai-Ho Yu
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Inertial Force ◽  
Contact Forces ◽  
Friction Layer ◽  
Layer Analysis ◽  
Tangential Forces ◽  
The Relationship ◽  
Motor Model ◽  
Layer Concept

Abstract This study applied appropriate assumptions to simplify a surface acoustic wave (SAW) motor model, as well as the elastic friction layer concept to analyze the two-dimensional contact problem. The effect of inertial force was factored into the equation of motion for the friction layer; the relationship between external force and the displacement of the friction layer surface was determined via Fourier transform; and the displacement field under different loads was analyzed using numerical methods. Based on the friction theory proposed by Armstrong, the relative velocity of the friction layer between the slider and stator was considered in the relationship between the normal and tangential forces acting on both contact surfaces. Finally, the deformation and the contact forces acting on the friction layer were evaluated by assuming the displacement of the stator substrate.

OBLIQUE ACOUSTIC AXES IN TRIGONAL CRYSTALS

2001 ◽  
Vol 09 (03) ◽  
pp. 1147-1161 ◽  
Author(s):  
V. G. MOZHAEV ◽  
F. BOSIA ◽  
M. WEIHNACHT
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Elastic Symmetry ◽  
Bulk Acoustic Waves ◽  
General Orientation ◽  
General Derivation ◽  
The Subject ◽  
The Relationship

A general analysis on the subject of acoustic axes for bulk acoustic waves in trigonal crystals is presented. It is shown that the effect of piezoelectricity increases the maximum allowable number of acoustic axes in the plane of elastic symmetry from three to five for trigonal crystals of class 3m, and from 3 to 7 for trigonal crystals of class 32. The theory of acoustic axes of general orientation developed by Khatkevich (1962) is revised. A new, simpler and more general derivation of the conditions for the occurrence of acoustic axes of general orientation in crystals is presented. It is found that the previous analytical results and conclusions stating the absence of such axes in trigonal crystals are incorrect. New correct equations for acoustic axes of general orientation in trigonal nonpiezoelectric crystals are derived and confirmed by independent numerical calculations. Acoustic axes of general orientation oblique to the elastic symmetry planes are found to exist in berlinite (class 32) and in nonpiezoelectric lithium niobate (class 3m), however piezoelectricity eliminates these axes in the latter crystal. Some illustrative examples of the relationship between leaky surface acoustic wave branches and acoustic axes in trigonal crystals are given.

Quantitative and nondestructive determination of residual stress for SiO2 thin film by laser-generated surface acoustic wave technique

2021 ◽  
Author(s):  
Li Zhang ◽  
Xia Xiao ◽  
Haiyang Qi ◽  
Yiting Huang ◽  
Huiquan Qin
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Residual Stress ◽  
Integrated Circuits ◽  
Acoustic Wave ◽  
Dispersion Curve ◽  
Surface Acoustic Wave ◽  
Physical And Mechanical Properties ◽  
Sio2 Film ◽  
Sio2 Films

Abstract The laser-generated surface acoustic wave (SAW) technique is a promising method to measure the mechanical properties of thin films quickly and nondestructively. Residual stress is inevitable during the processing and manufacturing of integrated circuits, which will have a major impact on the physical and mechanical properties of the thin film materials and cause deterioration to the structural strength. In this study, the SAW technique based method is proposed for quantitative and nondestructive measuring the residual stress in the nanostructured films. The method is verified by the experiment measuring the SiO2 films in the thickness range of 100 to 2000 nm. The experimental procedures, including signal excitation, reception and processing, are described in detail. By matching the SAW experimental dispersion curve with the calculated theoretical dispersion curve containing the residual stress, the residual stress of the SiO2 films along [110] and [100] crystallographic orientation of the Si wafer is successfully quantified. The determination results are ranged from -65.5 to 421.1 MPa and the stress value increases as the film thickness decreases, revealing the residual stress of the SiO2 film is compressive. Meanwhile, the conventional substrate curvature method as a comparison is used to verify the correctness and feasibility of the proposed SAW method for the residual stress determination.

Study on the Influence of Roughness on the Detection for Mechanical Characteristics of the Machined Surface by Surface Acoustic Wave Dispersion Theory

2016 ◽  
Vol 693 ◽  
pp. 1447-1452
Author(s):  
Jing Lei Xu ◽  
Bin Lin ◽  
Ya Xu Wei
Keyword(s):  
Wave Propagation ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Mechanical Characteristics ◽  
Fractal Theory ◽  
Surface Acoustic Waves ◽  
Wave Dispersion ◽  
Acoustic Wave Propagation ◽  
Machined Surface

The surface acoustic wave (SAW) technique is a precise and nondestructive method to detect the mechanical characteristics of the precision-machined surface. The paper is concerned with the effect of the roughness of the machined surface on the dispersion of surface acoustic waves propagating in the precision-machined surface which indicates mechanical characteristics of the machined surface. The finite element method (FEM) is employed by establishing a series of models with different roughness Ra value to analyze influences from different roughness Ra value on surface acoustic wave dispersion. The models are established by applying a combined method based on fractal theory and wavelet analysis. The simulation results showed that the roughness of machined surface will cause the dispersion of surface acoustic wave propagation, the effect varies with the different roughness Ra values. A critical Ra value influencing on the surface acoustic wave propagation exists. Accordingly, that the factor of roughness should be considered in advance or not, the situation can be determined through studying and determining the critical roughness Ra value above mentioned. Consequently, the study has the important meaning regarding the detection for mechanical characteristics of the machined surface.

STUDY OF DEFECTS IN a-Ge AND a-GeHxUSING SURFACE ACOUSTIC WAVE TECHNIQUE

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-365-C4-368
Author(s):  
K. L. Bhatia ◽  
M.v. Haumeder ◽  
S. Hunklinger
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Technique

Powder Transport by Surface Acoustic Wave Actuator using Bragg Reflection

2014 ◽  
Vol 134 (12) ◽  
pp. 1934-1935
Author(s):  
Tsunemasa Saiki ◽  
Yuya Matsui ◽  
Yasuto Arisue ◽  
Yuichi Utsumi ◽  
Akinobu Yamaguchi
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Bragg Reflection

Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

2008 ◽  
Author(s):  
A. Kabulski ◽  
V. R. Pagán ◽  
D. Cortes ◽  
R. Burda ◽  
O. M. Mukdadi ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Sensors ◽  
Wave Sensors
Sign in / Sign up

Export Citation Format

Share Document