scholarly journals Novel Microwave Gas Sensor using Dielectric Resonator With SnO2 Sensitive Layer

2009 ◽  
Vol 1 (1) ◽  
pp. 935-938 ◽  
Author(s):  
H. Hallil ◽  
P. Ménini ◽  
H. Aubert
Keyword(s):  
Gas Sensor ◽  
Dielectric Resonator ◽  
Sensitive Layer

scholarly journals Synthesis Sensitive Layer of Ethylene Gas Sensor Based Tin Oxide Nanoparticles Using Water as Solvent In Precipitation Method

2018 ◽  
Vol 159 ◽  
pp. 01060
Author(s):  
Erica Caesariaty Harni Prima Nabena ◽  
Brian Yuliarto ◽  
Nugraha ◽  
Muhammad Iqbal
Keyword(s):  
Gas Sensor ◽  
Tin Oxide ◽  
Water Solution ◽  
Precipitation Method ◽  
Pure Sno2 ◽  
Maturity Level ◽  
Sensitive Layer ◽  
Water As Solvent ◽  
Sno2 Nanoparticle ◽  
Tin Oxide Nanoparticles

Ethylene gas is a gas naturally released by fruits. The maturity level of these fruits could be predicted from the amount of ethylene around them. To maintain the freshness of these fruits, the concentrations of surrounding ethylene need to be monitored. Therefore, suitable gas sensor ethylene were still in progress to get good respond. In this paper systhesis of pure SnO2 nanoparticle from SnCl2.2H2O and water solution in precipitation method was held. The tin oxide powder was obtained in good distribution with nanoparticle size. This nanoparticle powder was formed into thick film, using ethylene glycol as solvant. To observe this sensor characteristics, several test was held in various conditions. Gas testing used pure ethylene gas show better respond at higher than room temperature but recovery time still unsatisfying.

Quartz crystal microbalance gas sensor with nanocrystalline diamond sensitive layer

2015 ◽  
Vol 252 (11) ◽  
pp. 2591-2597 ◽  
Author(s):  
M. Varga ◽  
A. Laposa ◽  
P. Kulha ◽  
J. Kroutil ◽  
M. Husak ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Nanocrystalline Diamond ◽  
Sensitive Layer

The Influence of Catalysts on the Gas Sensitivity of a Gas Sensor Based on SnO2 Films + 1 % at. Si

2020 ◽  
Vol 28 ◽  
pp. 161-169
Author(s):  
Tatyana Aleksandrovna Perepechina ◽  
Stanislav Ivanovich Rembeza ◽  
Tamara Vital'evna Svistova ◽  
Еkaterina Stanislavovna Rembeza ◽  
Vadim Aleksandrovich Buslov
Keyword(s):  
Surface Modification ◽  
Film Thickness ◽  
Gas Sensor ◽  
Tin Dioxide ◽  
Operating Temperature ◽  
Sensitive Layer ◽  
Gas Sensitivity ◽  
Microelectronic Technology

The paper is devoted to the study of the influence of surface modification by catalysts on the gas sensitivity of a gas sensor. The sample for the study is a gas sensor crystal with dimensions of 1 × 1 mm2, manufactured using microelectronic technology. Its design is represented by a film heater, two sensitive elements (SE) based on tin dioxide with the addition of 1 % at. Si (film thickness = 250 nm, the size of the SE area is 200 x 320 μm2) and contacts for the sensitive layer in the form of an interdigital platinum structure with a distance between contacts of 10 μm. It is established that doping increases the gas sensitivity and lowers the operating temperature.

scholarly journals How the Gas Flow Affects Conductometric Sensor Performance

Proceedings ◽  
2019 ◽  
Vol 14 (1) ◽  
pp. 6
Author(s):  
Laura Parellada-Monreal ◽  
Alain Martín-Mayor ◽  
M. Mounir Bou-Ali ◽  
Gemma García Mandayo
Keyword(s):  
Metal Oxide ◽  
Gas Sensor ◽  
Gas Flow ◽  
Annealing Treatment ◽  
Fabrication Process ◽  
Sensitive Layer ◽  
Sensor Performance ◽  
Post Annealing ◽  
Metal Oxide Gas Sensor ◽  
Conductometric Sensor

The performance of a metal oxide gas sensor can be affected by different parameters as the fabrication process of the sensitive layer or the post-annealing treatment. [...]

Microwave flexible gas sensor based on polymer multi wall carbon nanotubes sensitive layer

2017 ◽  
Vol 249 ◽  
pp. 708-714 ◽  
Author(s):  
P. Bahoumina ◽  
H. Hallil ◽  
J.L. Lachaud ◽  
A. Abdelghani ◽  
K. Frigui ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Gas Sensor ◽  
Sensitive Layer ◽  
Multi Wall Carbon Nanotubes

Trace Gas Sensor Based on MEMS Cantilever Resonator

2011 ◽  
Vol 383-390 ◽  
pp. 3115-3120 ◽  
Author(s):  
Ying Dong ◽  
Wei Gao ◽  
Zheng You
Keyword(s):  
Relative Humidity ◽  
Gas Sensor ◽  
Silicon On Insulator ◽  
Trace Gas ◽  
Sensitive Layer ◽  
Oscillation System ◽  
Trace Level ◽  
Volatile Organic ◽  
Spraying Method ◽  
Acetone Hexane

A chemical gas sensor for volatile organic compounds (VOCs) detection at trace level is proposed. In this paper, the development and demonstration of the sensor prototype are presented. The prototype is based on a microcantilever resonator that is fabricated from direct bonding silicon-on-insulator (SOI) wafer. The resonant cantilever employs integrated thermal driving and piezoresistive detecting units, and operates in a self-oscillation system. Polyethylenevinylacetate (PEVA) is deposited on top of the cantilever as gas sensitive layer through a spraying method. The responses of the prototype to relative humidity (RH) and six common VOCs: toluene, benzene, ethanol, acetone, hexane and octane have been tested. The PEVA-coated prototype has trace sensitivity to toluene, benzene, hexane and octane, while is insensitive to humidity. The experimental results provide confirmation that the microcantilever resonator is an excellent platform for chemical gas sensor.

scholarly journals PROCESS TECHNOLOGY OF FABRICATION NO2 GAS SENSOR DEVICES WITH ACTIVE LAYER In2O3

2016 ◽  
Vol 10 (1) ◽  
pp. 69
Author(s):  
Slamet Widodo
Keyword(s):  
Metal Oxide ◽  
Aluminum Oxide ◽  
Gas Sensor ◽  
Heat Distribution ◽  
Process Technology ◽  
Sensitive Layer ◽  
Resistance Change ◽  
No2 Gas Sensor ◽  
Sensor Device ◽  
Sensor Devices

This paper discuss the design and fabrication of NO<sub>2 </sub>gas sensor based on metal oxide using thick film technology was described. The design of gas sensor is consisted of components, i.e. heater, electrode (interdigital fingers) and sensitive layer from In<sub>2</sub>O<sub>3</sub> material. This sensor has been designed as multilayers with heater and both electrodes in one surface, in accordance with miniaturisation aspect, heat distribution and less consumption of energy from the sensor device. The heater and electrode were fabricated on alumina substrate (aluminum oxide/Al<sub>2</sub>O<sub>3</sub>) with silver paste. The In<sub>2</sub>O<sub>3 </sub>layer provides\ resistance change when it is exposed by NO<sub>2</sub> gas. It indicates that this sensor device has a potency to be used as NO<sub>2 </sub>detector.

scholarly journals PROCESS TECHNOLOGY OF FABRICATION NO2 GAS SENSOR DEVICES WITH ACTIVE LAYER In2O3

2018 ◽  
Vol 10 (1) ◽  
pp. 69
Author(s):  
Slamet Widodo
Keyword(s):  
Metal Oxide ◽  
Aluminum Oxide ◽  
Gas Sensor ◽  
Heat Distribution ◽  
Process Technology ◽  
Sensitive Layer ◽  
Resistance Change ◽  
No2 Gas Sensor ◽  
Sensor Device ◽  
Sensor Devices

This paper discuss the design and fabrication of NO<sub>2 </sub>gas sensor based on metal oxide using thick film technology was described. The design of gas sensor is consisted of components, i.e. heater, electrode (interdigital fingers) and sensitive layer from In<sub>2</sub>O<sub>3</sub> material. This sensor has been designed as multilayers with heater and both electrodes in one surface, in accordance with miniaturisation aspect, heat distribution and less consumption of energy from the sensor device. The heater and electrode were fabricated on alumina substrate (aluminum oxide/Al<sub>2</sub>O<sub>3</sub>) with silver paste. The In<sub>2</sub>O<sub>3 </sub>layer provides\ resistance change when it is exposed by NO<sub>2</sub> gas. It indicates that this sensor device has a potency to be used as NO<sub>2 </sub>detector.

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