Fabrication of nanofluidic devices in glass with polysilicon electrodes

2005 ◽  
Vol 123-124 ◽  
pp. 602-607 ◽  
Author(s):  
V.G. Kutchoukov ◽  
L. Pakula ◽  
G.O.F. Parikesit ◽  
Y. Garini ◽  
L.K. Nanver ◽  
...  
Keyword(s):  
2021 ◽  
Vol 38 (2) ◽  
pp. 2170003
Author(s):  
Deepika Sharma ◽  
Roderick Y. H. Lim ◽  
Thomas Pfohl ◽  
Yasin Ekinci

Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 775
Author(s):  
Hiroki Kamai ◽  
Yan Xu

Nanofluidics is supposed to take advantage of a variety of new physical phenomena and unusual effects at nanoscales typically below 100 nm. However, the current chip-based nanofluidic applications are mostly based on the use of nanochannels with linewidths above 100 nm, due to the restricted ability of the efficient fabrication of nanochannels with narrow linewidths in glass substrates. In this study, we established the fabrication of nanofluidic structures in glass substrates with narrow linewidths of several tens of nanometers by optimizing a nanofabrication process composed of electron-beam lithography and plasma dry etching. Using the optimized process, we achieved the efficient fabrication of fine glass nanochannels with sub-40 nm linewidths, uniform lateral features, and smooth morphologies, in an accurate and precise way. Furthermore, the use of the process allowed the integration of similar or dissimilar material-based ultrasmall nanocomponents in the ultranarrow nanochannels, including arrays of pockets with volumes as less as 42 zeptoliters (zL, 10−21 L) and well-defined gold nanogaps as narrow as 19 nm. We believe that the established nanofabrication process will be very useful for expanding fundamental research and in further improving the applications of nanofluidic devices.


Lab on a Chip ◽  
2021 ◽  
Author(s):  
Steven A Soper ◽  
Swarnagowri Vaidyanathan ◽  
Franklin Uba ◽  
Bo Hu ◽  
David Kaufman ◽  
...  

DNA damage can take many forms such as double-strand breaks and/or the formation of abasic (apurinic/apyrimidinic; AP) sites. The presence of AP sites can be used to determine therapeutic efficacy...


2011 ◽  
Vol 4 (1) ◽  
pp. 321-341 ◽  
Author(s):  
Kaimeng Zhou ◽  
John M. Perry ◽  
Stephen C. Jacobson
Keyword(s):  

Author(s):  
Rohit Karnik ◽  
Chuanhua Duan ◽  
Kenneth Castelino ◽  
Rong Fan ◽  
Peidong Yang ◽  
...  

Interesting transport phenomena arise when fluids are confined to nanoscale dimensions in the range of 1–100 nm. We examine three distinct effects that influence ionic and molecular transport as the size of fluidic channels is decreased to the nanoscale. First, the length scale of electrostatic interactions in aqueous solutions becomes comparable to nanochannel size and the number of surface charges becomes comparable to the number of ions in the channel. Second, the size of the channel becomes comparable to the size of biomolecules such as proteins and DNA. Third, large surface area-to-volume ratios result in rapid rates of surface reactions and can dramatically affect transport of molecules through the channel. These phenomena enable us to control transport of ions and molecules in unique ways that are not possible in larger channels. Electrostatic interactions enable local control of ionic concentrations and transport inside nanochannels through field effect in a nanofluidic transistor, which is analogous to the metal-oxide-semiconductor field effect transistor. Furthermore, by controlling surface charge in nanochannels, it is possible to create a nanofluidic diode that rectifies ionic transport through the channel. Biological binding events result in partial blockage of the channel, and can thus be sensed by a decrease in nanochannel conductance. At low ionic concentrations, the effect of biomolecular charge is dominant and it can lead to an increase in conductance. Surface reactions can also be used to control transport of molecules though the channel due to the large surface area-to-volume ratios. Rapid surface reactions enable a new technique of diffusion-limited patterning (DLP), which is useful for patterning of biomolecules and surface charge in nanochannels. These examples illustrate how electrostatic interactions, biomolecular size, and surface reactions can be used for controlling ionic and molecular transport through nanochannels. These phenomena may be useful for operations such as analyte focusing, pH and ionic concentration control, and biosensing in micro- and nanofluidic devices.


2013 ◽  
Vol 7 (2) ◽  
pp. 026501 ◽  
Author(s):  
Chuanhua Duan ◽  
Wei Wang ◽  
Quan Xie

Micromachines ◽  
2011 ◽  
Vol 2 (1) ◽  
pp. 17-48 ◽  
Author(s):  
Hwa Seng Khoo ◽  
Cheng Lin ◽  
Shih-Hao Huang ◽  
Fan-Gang Tseng

2008 ◽  
Vol 80 (7) ◽  
pp. 2326-2341 ◽  
Author(s):  
Patrick Abgrall ◽  
Nam Trung Nguyen
Keyword(s):  

Lab on a Chip ◽  
2019 ◽  
Vol 19 (9) ◽  
pp. 1686-1694 ◽  
Author(s):  
Yutaka Kazoe ◽  
Yuriy Pihosh ◽  
Hitomi Takahashi ◽  
Takeshi Ohyama ◽  
Hiroki Sano ◽  
...  
Keyword(s):  

A femtoliter nanochannel open/close valve utilizing tiny glass deformation, which will enable highly-integrated glass nanofluidic devices, was proposed and demonstrated.


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