Angle-dependent XPS analysis of silicon nitride film deposited on screen-printed crystalline silicon solar cell

2009 ◽  
Vol 93 (1) ◽  
pp. 19-24 ◽  
Author(s):  
Priyanka Singh ◽  
S.M. Shivaprasad ◽  
M. Lal ◽  
M. Husain
2012 ◽  
Vol 2012 ◽  
pp. 1-5 ◽  
Author(s):  
Bangwu Liu ◽  
Sihua Zhong ◽  
Jinhu Liu ◽  
Yang Xia ◽  
Chaobo Li

The passivation process is of significant importance to produce high-efficiency black silicon solar cell due to its unique microstructure. The black silicon has been produced by plasma immersion ion implantation (PIII) process. And the Silicon nitride films were deposited by inline plasma-enhanced chemical vapor deposition (PECVD) to be used as the passivation layer for black silicon solar cell. The microstructure and physical properties of silicon nitride films were characterized by scanning electron microscope (SEM), Fourier transform infrared spectroscopy (FTIR), spectroscopic ellipsometry, and the microwave photoconductance decay (μ-PCD) method. With optimizing the PECVD parameters, the conversion efficiency of black silicon solar cell can reach as high as 16.25%.


2012 ◽  
Vol 7 (1) ◽  
pp. 410 ◽  
Author(s):  
Kyuwan Song ◽  
Bonggi Kim ◽  
Hoongjoo Lee ◽  
Youn-Jung Lee ◽  
Cheolmin Park ◽  
...  

2012 ◽  
Vol 30 (1-2) ◽  
pp. 41-45 ◽  
Author(s):  
Jinkuk Kim ◽  
Jejun Park ◽  
Ji Hwa Hong ◽  
Sung Jin Choi ◽  
Gi Hwan Kang ◽  
...  

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